Preferred orientation and piezoelectricity in sputtered ZnO films

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Keywords

@article{418585bf27d54e62a0107ce9fb65fdda,

title = "Preferred orientation and piezoelectricity in sputtered ZnO films",

keywords = "METIS-111516",

author = "Gardeniers, \{Johannes G.E.\} and Z.M. Rittersma and G.J. Burger",

year = "1998",

language = "Undefined",

volume = "83",

pages = "7844--7854",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}