Preliminary results of a silicon condenser microphone with internal feedback

A.G.H. van der Donk, A.J. Sprenkels, W. Olthuis, P. Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    62 Downloads (Pure)

    Abstract

    In order to overcome the problem of a too large bias voltage and to increase the bandwidth of silicon condenser microphones with small air gaps, an electrostatic feedback system is presented that will reduce the movement of the diaphragm of the microphone. It is shown that a 10-fold reduction of the movement of the diaphragm is possible for microphones with an air gap of 35 μm. However, to get a reduction of about ten times over a wide range of frequencies, an actuator with a larger sensitivity is needed. This can be achieved by the use of a smaller air gap, which may also increase the sensor sensitivity
    Original languageEnglish
    Title of host publicationTransducers '9
    Subtitle of host publicationdigest of technical papers: 1991 International Conference on Solid-State Sensors and Actuators
    Place of PublicationPiscataway, N.J.
    PublisherIEEE
    Pages262-265
    Number of pages4
    ISBN (Print)9780879425852
    DOIs
    Publication statusPublished - 25 Jun 1991
    Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
    Duration: 24 Jun 199127 Jun 1991

    Conference

    Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
    Abbreviated titleTRANSDUCERS '91
    CountryUnited States
    CitySan Francisco
    Period24/06/9127/06/91

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  • Cite this

    van der Donk, A. G. H., Sprenkels, A. J., Olthuis, W., & Bergveld, P. (1991). Preliminary results of a silicon condenser microphone with internal feedback. In Transducers '9: digest of technical papers: 1991 International Conference on Solid-State Sensors and Actuators (pp. 262-265). Piscataway, N.J.: IEEE. https://doi.org/10.1109/SENSOR.1991.148856