Preliminary results of a silicon condenser microphone with internal feedback

A.G.H. van der Donk; A.J. Sprenkels; W. Olthuis; P. Bergveld

doi:10.1109/SENSOR.1991.148856

Preliminary results of a silicon condenser microphone with internal feedback

A.G.H. van der Donk, A.J. Sprenkels, W. Olthuis, P. Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

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Abstract

In order to overcome the problem of a too large bias voltage and to increase the bandwidth of silicon condenser microphones with small air gaps, an electrostatic feedback system is presented that will reduce the movement of the diaphragm of the microphone. It is shown that a 10-fold reduction of the movement of the diaphragm is possible for microphones with an air gap of 35 μm. However, to get a reduction of about ten times over a wide range of frequencies, an actuator with a larger sensitivity is needed. This can be achieved by the use of a smaller air gap, which may also increase the sensor sensitivity

Original language	English
Title of host publication	Transducers '9
Subtitle of host publication	digest of technical papers: 1991 International Conference on Solid-State Sensors and Actuators
Place of Publication	Piscataway, N.J.
Publisher	IEEE
Pages	262-265
Number of pages	4
ISBN (Print)	9780879425852
DOIs	https://doi.org/10.1109/SENSOR.1991.148856
Publication status	Published - 25 Jun 1991
Event	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States Duration: 24 Jun 1991 → 27 Jun 1991

Conference

Conference	1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
Abbreviated title	TRANSDUCERS '91
Country/Territory	United States
City	San Francisco
Period	24/06/91 → 27/06/91

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10.1109/SENSOR.1991.148856

VanderDonk1991PreliminaryFinal published version, 363 KB

Cite this

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title = "Preliminary results of a silicon condenser microphone with internal feedback",

abstract = "In order to overcome the problem of a too large bias voltage and to increase the bandwidth of silicon condenser microphones with small air gaps, an electrostatic feedback system is presented that will reduce the movement of the diaphragm of the microphone. It is shown that a 10-fold reduction of the movement of the diaphragm is possible for microphones with an air gap of 35 μm. However, to get a reduction of about ten times over a wide range of frequencies, an actuator with a larger sensitivity is needed. This can be achieved by the use of a smaller air gap, which may also increase the sensor sensitivity",

author = "{van der Donk}, A.G.H. and A.J. Sprenkels and W. Olthuis and P. Bergveld",

year = "1991",

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doi = "10.1109/SENSOR.1991.148856",

language = "English",

isbn = "9780879425852",

pages = "262--265",

booktitle = "Transducers '9",

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address = "United States",

note = "1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, TRANSDUCERS '91 ; Conference date: 24-06-1991 Through 27-06-1991",

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van der Donk, AGH, Sprenkels, AJ, Olthuis, W & Bergveld, P 1991, Preliminary results of a silicon condenser microphone with internal feedback. in Transducers '9: digest of technical papers: 1991 International Conference on Solid-State Sensors and Actuators. IEEE, Piscataway, N.J., pp. 262-265, 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, San Francisco, California, United States, 24/06/91. https://doi.org/10.1109/SENSOR.1991.148856

Preliminary results of a silicon condenser microphone with internal feedback. / van der Donk, A.G.H.; Sprenkels, A.J.; Olthuis, W. et al.
Transducers '9: digest of technical papers: 1991 International Conference on Solid-State Sensors and Actuators. Piscataway, N.J.: IEEE, 1991. p. 262-265.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Preliminary results of a silicon condenser microphone with internal feedback

AU - van der Donk, A.G.H.

AU - Sprenkels, A.J.

AU - Olthuis, W.

AU - Bergveld, P.

PY - 1991/6/25

Y1 - 1991/6/25

N2 - In order to overcome the problem of a too large bias voltage and to increase the bandwidth of silicon condenser microphones with small air gaps, an electrostatic feedback system is presented that will reduce the movement of the diaphragm of the microphone. It is shown that a 10-fold reduction of the movement of the diaphragm is possible for microphones with an air gap of 35 μm. However, to get a reduction of about ten times over a wide range of frequencies, an actuator with a larger sensitivity is needed. This can be achieved by the use of a smaller air gap, which may also increase the sensor sensitivity

AB - In order to overcome the problem of a too large bias voltage and to increase the bandwidth of silicon condenser microphones with small air gaps, an electrostatic feedback system is presented that will reduce the movement of the diaphragm of the microphone. It is shown that a 10-fold reduction of the movement of the diaphragm is possible for microphones with an air gap of 35 μm. However, to get a reduction of about ten times over a wide range of frequencies, an actuator with a larger sensitivity is needed. This can be achieved by the use of a smaller air gap, which may also increase the sensor sensitivity

U2 - 10.1109/SENSOR.1991.148856

DO - 10.1109/SENSOR.1991.148856

M3 - Conference contribution

SN - 9780879425852

SP - 262

EP - 265

BT - Transducers '9

PB - IEEE

CY - Piscataway, N.J.

T2 - 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991

Y2 - 24 June 1991 through 27 June 1991

ER -

Preliminary results of a silicon condenser microphone with internal feedback

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