Preparation of cross-sectional transmission electron microscopy specimens of obliquely deposited magnetic thin films on a flexible tape

Enrico G. Keim, Martin D. Bijker, J. Cock Lodder

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    Abstract

    n this article a method is described for preparing cross sections of obliquely deposited metal thin films on polymer substrates for transmission electron microscopy (TEM) observation. The layers of interest are brittle in nature and therefore it is difficult to obtain suitable TEM samples with conventional methods. Apart from the sample preparation method some details of the deposition technique will be elucidated.
    Original languageEnglish
    Pages (from-to)1191-1194
    Number of pages4
    JournalJournal of vacuum science and technology A: vacuum, surfaces, and films
    Volume19
    Issue number4
    DOIs
    Publication statusPublished - 2001

    Keywords

    • SMI-EXP: EXPERIMENTAL TECHNIQUES
    • SMI-TST: From 2006 in EWI-TST

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