Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane

D.H. Tong, Albert van den Berg, A.H.J. van den Berg, Johannes G.E. Gardeniers, Henricus V. Jansen, F.C. Gielens, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

31 Citations (Scopus)
31 Downloads (Pure)


Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium
Original languageUndefined
Pages (from-to)89-94
Number of pages6
JournalThin solid films
Issue number1-2
Publication statusPublished - 23 May 2005


  • EWI-9828
  • IR-51079
  • METIS-224042

Cite this