Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane

H.D. Tong; A.H.J. van den Berg; J.G.E. Gardeniers; H.V. Jansen; F.C. Gielens; M.C. Elwenspoek

doi:10.1016/j.tsf.2004.11.179

Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane

H.D. Tong, A.H.J. van den Berg, J.G.E. Gardeniers, H.V. Jansen, F.C. Gielens, M.C. Elwenspoek

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Abstract

Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium

Original language	English
Pages (from-to)	89-94
Number of pages	6
Journal	Thin solid films
Volume	479
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2004.11.179
Publication status	Published - 23 May 2005

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title = "Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane",

abstract = "Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium",

author = "H.D. Tong and {van den Berg}, A.H.J. and J.G.E. Gardeniers and H.V. Jansen and F.C. Gielens and M.C. Elwenspoek",

year = "2005",

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TY - JOUR

T1 - Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane

AU - Tong, H.D.

AU - van den Berg, A.H.J.

AU - Gardeniers, J.G.E.

AU - Jansen, H.V.

AU - Gielens, F.C.

AU - Elwenspoek, M.C.

PY - 2005/5/23

Y1 - 2005/5/23

N2 - Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium

AB - Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium

U2 - 10.1016/j.tsf.2004.11.179

DO - 10.1016/j.tsf.2004.11.179

M3 - Article

SN - 0040-6090

VL - 479

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EP - 94

JO - Thin solid films

JF - Thin solid films

IS - 1-2

ER -

Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane

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