Pressure sensor based on distributed temperature sensing

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
31 Downloads (Pure)

Abstract

A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.
Original languageUndefined
Title of host publicationProceedings of IEEE Sensors
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages964-968
Number of pages5
ISBN (Print)0-7803-7454-1
DOIs
Publication statusPublished - 12 Jun 2002
Event2002 IEEE Sensors: The 1st Conference on Sensors - Hyatt Orlando Hotel, Orlando, United States
Duration: 12 Jun 200214 Jun 2002
http://ewh.ieee.org/conf/sensors2002/

Publication series

Name
PublisherIEEE
Volume2

Conference

Conference2002 IEEE Sensors
CountryUnited States
CityOrlando
Period12/06/0214/06/02
Internet address

Keywords

  • METIS-206399
  • IR-43352
  • EWI-12696

Cite this

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title = "Pressure sensor based on distributed temperature sensing",
abstract = "A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.",
keywords = "METIS-206399, IR-43352, EWI-12696",
author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Berenschot, {Johan W.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2002",
month = "6",
day = "12",
doi = "10.1109/ICSENS.2002.1037240",
language = "Undefined",
isbn = "0-7803-7454-1",
publisher = "IEEE Computer Society",
pages = "964--968",
booktitle = "Proceedings of IEEE Sensors",
address = "United States",

}

van Baar, JJJ, Wiegerink, RJ, Berenschot, JW, Lammerink, TSJ, Krijnen, GJM & Elwenspoek, MC 2002, Pressure sensor based on distributed temperature sensing. in Proceedings of IEEE Sensors. IEEE Computer Society, Piscataway, pp. 964-968, 2002 IEEE Sensors, Orlando, United States, 12/06/02. https://doi.org/10.1109/ICSENS.2002.1037240

Pressure sensor based on distributed temperature sensing. / van Baar, J.J.J.; Wiegerink, Remco J.; Berenschot, Johan W.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

Proceedings of IEEE Sensors. Piscataway : IEEE Computer Society, 2002. p. 964-968.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Pressure sensor based on distributed temperature sensing

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Berenschot, Johan W.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2002/6/12

Y1 - 2002/6/12

N2 - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.

AB - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.

KW - METIS-206399

KW - IR-43352

KW - EWI-12696

U2 - 10.1109/ICSENS.2002.1037240

DO - 10.1109/ICSENS.2002.1037240

M3 - Conference contribution

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BT - Proceedings of IEEE Sensors

PB - IEEE Computer Society

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