Pressure sensor based on distributed temperature sensing

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    Abstract

    A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.
    Original languageUndefined
    Title of host publicationProceedings of IEEE Sensors
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages964-968
    Number of pages5
    ISBN (Print)0-7803-7454-1
    DOIs
    Publication statusPublished - 12 Jun 2002
    Event1st IEEE International Conference on Sensors, IEEE Sensors 2002 - Hyatt Orlando Hotel, Orlando, United States
    Duration: 12 Jun 200214 Jun 2002
    Conference number: 1
    http://ewh.ieee.org/conf/sensors2002/

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    Conference1st IEEE International Conference on Sensors, IEEE Sensors 2002
    Abbreviated titleIEEE Sensors 2002
    CountryUnited States
    CityOrlando
    Period12/06/0214/06/02
    Internet address

    Keywords

    • METIS-206399
    • IR-43352
    • EWI-12696

    Cite this

    van Baar, J. J. J., Wiegerink, R. J., Berenschot, J. W., Lammerink, T. S. J., Krijnen, G. J. M., & Elwenspoek, M. C. (2002). Pressure sensor based on distributed temperature sensing. In Proceedings of IEEE Sensors (pp. 964-968). Piscataway: IEEE Computer Society. https://doi.org/10.1109/ICSENS.2002.1037240