Pressure sensor based on distributed temperature sensing

J.J.J. van Baar; Remco J. Wiegerink; Johan W. Berenschot; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/ICSENS.2002.1037240

Pressure sensor based on distributed temperature sensing

J.J.J. van Baar, Remco J. Wiegerink, Johan W. Berenschot, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

187 Downloads (Pure)

Abstract

A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.

Original language	Undefined
Title of host publication	Proceedings of IEEE Sensors
Place of Publication	Piscataway
Publisher	IEEE
Pages	964-968
Number of pages	5
ISBN (Print)	0-7803-7454-1
DOIs	https://doi.org/10.1109/ICSENS.2002.1037240
Publication status	Published - 12 Jun 2002
Event	1st IEEE International Conference on Sensors, IEEE Sensors 2002 - Hyatt Orlando Hotel, Orlando, United States Duration: 12 Jun 2002 → 14 Jun 2002 Conference number: 1 http://ewh.ieee.org/conf/sensors2002/

Publication series

Name
Publisher	IEEE
Volume	2

Conference

Conference	1st IEEE International Conference on Sensors, IEEE Sensors 2002
Abbreviated title	IEEE Sensors 2002
Country/Territory	United States
City	Orlando
Period	12/06/02 → 14/06/02
Internet address	http://ewh.ieee.org/conf/sensors2002/

Keywords

METIS-206399
IR-43352
EWI-12696

Access to Document

10.1109/ICSENS.2002.1037240

Cite this

@inproceedings{716d0d3c62094a84be852d6c2cc053b1,

title = "Pressure sensor based on distributed temperature sensing",

abstract = "A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.",

keywords = "METIS-206399, IR-43352, EWI-12696",

author = "{van Baar}, J.J.J. and Wiegerink, {Remco J.} and Berenschot, {Johan W.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2002",

month = jun,

day = "12",

doi = "10.1109/ICSENS.2002.1037240",

language = "Undefined",

isbn = "0-7803-7454-1",

publisher = "IEEE",

pages = "964--968",

booktitle = "Proceedings of IEEE Sensors",

address = "United States",

note = "1st IEEE International Conference on Sensors, IEEE Sensors 2002 ; Conference date: 12-06-2002 Through 14-06-2002",

url = "http://ewh.ieee.org/conf/sensors2002/",

}

van Baar, JJJ, Wiegerink, RJ , Berenschot, JW, Lammerink, TSJ, Krijnen, GJM & Elwenspoek, MC 2002, Pressure sensor based on distributed temperature sensing. in Proceedings of IEEE Sensors. IEEE, Piscataway, pp. 964-968, 1st IEEE International Conference on Sensors, IEEE Sensors 2002, Orlando, Florida, United States, 12/06/02. https://doi.org/10.1109/ICSENS.2002.1037240

TY - GEN

T1 - Pressure sensor based on distributed temperature sensing

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Berenschot, Johan W.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 1

PY - 2002/6/12

Y1 - 2002/6/12

N2 - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.

AB - A differential pressure sensor has been realized with thermal readout. The thermal readout allows simultaneous measurement of the membrane deflection due to a pressure difference and measurement of the absolute pressure by operating the structure as a Pirani pressure sensor. The measuring of the temperature distribution makes it possible to take the heat transfer to the support in account and make the measurements independent of the temperature coefficient of resistance of the sensing elements.

KW - METIS-206399

KW - IR-43352

KW - EWI-12696

U2 - 10.1109/ICSENS.2002.1037240

DO - 10.1109/ICSENS.2002.1037240

M3 - Conference contribution

SN - 0-7803-7454-1

SP - 964

EP - 968

BT - Proceedings of IEEE Sensors

PB - IEEE

CY - Piscataway

T2 - 1st IEEE International Conference on Sensors, IEEE Sensors 2002

Y2 - 12 June 2002 through 14 June 2002

ER -