Printing of complex free-standing microstructures via laser-induced forward transfer (LIFT) of pure metal thin films

Matthias Feinaeugle (Corresponding Author), Ralph Pohl, Ton Bor, Tom Vaneker, Gert-Willem Römer

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
39 Downloads (Pure)

Abstract

A combined approach of laser-induced forward transfer (LIFT) and chemical etching of pure metal films is studied to fabricate complex, free-standing, 3-dimensional gold structures on the few micron scale. A picosecond pulsed laser source with 515 nm central wavelength is used to deposit metal droplets of copper and gold in a sequential fashion. After transfer, chemical etching in ferric chloride completely removes the mechanical Cu support leaving a final free-standing gold structure. Unprecedented feature sizes of smaller than 10 μm are achieved with surface roughness of 0.3 to 0.7 μm. Formation of interfacial mixing volumes between the two metals is not found confirming the viability of the approach.
Original languageEnglish
Pages (from-to)391-399
Number of pages9
JournalAddItive manufacturing
Volume24
Early online date24 Sep 2018
DOIs
Publication statusPublished - 1 Dec 2018

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printing
Gold
Printing
Metals
gold
Thin films
microstructure
Microstructure
Lasers
Etching
thin films
etching
metals
lasers
Pulsed lasers
metal films
viability
Copper
pulsed lasers
surface roughness

Keywords

  • Microfabrication
  • Metal
  • Additive Manufacturing
  • Free-standing structure
  • Gold
  • Laser
  • Laser additive manufacturing
  • Laser-induced forward transfer

Cite this

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title = "Printing of complex free-standing microstructures via laser-induced forward transfer (LIFT) of pure metal thin films",
abstract = "A combined approach of laser-induced forward transfer (LIFT) and chemical etching of pure metal films is studied to fabricate complex, free-standing, 3-dimensional gold structures on the few micron scale. A picosecond pulsed laser source with 515 nm central wavelength is used to deposit metal droplets of copper and gold in a sequential fashion. After transfer, chemical etching in ferric chloride completely removes the mechanical Cu support leaving a final free-standing gold structure. Unprecedented feature sizes of smaller than 10 μm are achieved with surface roughness of 0.3 to 0.7 μm. Formation of interfacial mixing volumes between the two metals is not found confirming the viability of the approach.",
keywords = "Microfabrication, Metal, Additive Manufacturing, Free-standing structure, Gold, Laser, Laser additive manufacturing, Laser-induced forward transfer",
author = "Matthias Feinaeugle and Ralph Pohl and Ton Bor and Tom Vaneker and Gert-Willem R{\"o}mer",
year = "2018",
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day = "1",
doi = "10.1016/j.addma.2018.09.028",
language = "English",
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pages = "391--399",
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Printing of complex free-standing microstructures via laser-induced forward transfer (LIFT) of pure metal thin films. / Feinaeugle, Matthias (Corresponding Author); Pohl, Ralph; Bor, Ton; Vaneker, Tom; Römer, Gert-Willem.

In: AddItive manufacturing, Vol. 24, 01.12.2018, p. 391-399.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - Printing of complex free-standing microstructures via laser-induced forward transfer (LIFT) of pure metal thin films

AU - Feinaeugle, Matthias

AU - Pohl, Ralph

AU - Bor, Ton

AU - Vaneker, Tom

AU - Römer, Gert-Willem

PY - 2018/12/1

Y1 - 2018/12/1

N2 - A combined approach of laser-induced forward transfer (LIFT) and chemical etching of pure metal films is studied to fabricate complex, free-standing, 3-dimensional gold structures on the few micron scale. A picosecond pulsed laser source with 515 nm central wavelength is used to deposit metal droplets of copper and gold in a sequential fashion. After transfer, chemical etching in ferric chloride completely removes the mechanical Cu support leaving a final free-standing gold structure. Unprecedented feature sizes of smaller than 10 μm are achieved with surface roughness of 0.3 to 0.7 μm. Formation of interfacial mixing volumes between the two metals is not found confirming the viability of the approach.

AB - A combined approach of laser-induced forward transfer (LIFT) and chemical etching of pure metal films is studied to fabricate complex, free-standing, 3-dimensional gold structures on the few micron scale. A picosecond pulsed laser source with 515 nm central wavelength is used to deposit metal droplets of copper and gold in a sequential fashion. After transfer, chemical etching in ferric chloride completely removes the mechanical Cu support leaving a final free-standing gold structure. Unprecedented feature sizes of smaller than 10 μm are achieved with surface roughness of 0.3 to 0.7 μm. Formation of interfacial mixing volumes between the two metals is not found confirming the viability of the approach.

KW - Microfabrication

KW - Metal

KW - Additive Manufacturing

KW - Free-standing structure

KW - Gold

KW - Laser

KW - Laser additive manufacturing

KW - Laser-induced forward transfer

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