A 'stand-alone' Photon Scanning Tunneling Microscope combined with an Atomic force Microscope, using a micro-fabricated silicon-nitride probe, is applied to the imaging of field distribution in integrated optical ridge waveguides. The electric field on the waveguide is locally probed by coupling to the evanescent wave. Application to direct observation of TM and TE modal field distributions, both in lateral and vertical direction, mode beating between low and higher order modes, and behavior of a Y-junction wavelength (de)multiplexer is demonstrated.
|Name||Proceedings of SPIE|
|Conference||SPIE's International Conference on Optical Science, Engineering, and Instrumentation 1995|
|Period||9/07/95 → 14/07/95|