Process dependence of the piezoelectric response of membrane actuators based on PZT thin films

C.T.Q. Nguyen, Duc Minh Nguyen, Jan M. Dekkers, Evert Pieter Houwman, Hung Ngoc Vu, Augustinus J.H.M. Rijnders

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A process for the fabrication of piezoelectric membranes with Pb(Zr0.45Ti0.55)O3 (PZT) thin films for micrometer-range actuation and sensing applications has been developed. The films grown by sol-gel on the Pt/Ti/SiO2/SOI (silicon-on-insulator) substrates have similar randomly oriented perovskite phases, but the nearly epitaxial film made by the pulsed laser deposition exhibits a more compact and flat morphology. It is observed that a denser microstructure produced by pulsed laser deposition leads to a significantly higher remanent polarization and piezoelectric coefficient in the capacitor structure, as well as in a much higher piezoelectric membrane displacement, but only a slightly enhancement of the quality factor of the membrane actuator is obtained. The membrane actuator with the epitaxial PZT thin film grown on a SrRuO3/Yttria-Stabilized Zirconia/SOI substrate using pulsed laser deposition shows significantly enhanced piezoelectric membrane displacement and quality factor. The results and discussion in our paper provide a better understanding of the relationship between the microstructure and the thin film properties, which may lead to significant improvements in device performance
Original languageEnglish
Pages (from-to)509-514
Number of pages6
JournalThin solid films
Publication statusPublished - 2014


  • IR-90638
  • METIS-303200


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