Process Maturity Grids used a Decision Support Tool

R.G.J. Arendsen, A.C. Brombacher, B. Habraken, O.E. Herrmann

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Failure rates of modern ASICs and ASSPs can not be demonstrated using reliability tests on product level. Reliability demonstration must be done by
    quantifying the quality of the process that produces these integrated circuits. Process capability however, is not fixed over time. As a process gets more mature process capability tends to improve. In this paper we introduce the concept of process maturity growth to quantify the quality of suppliers processes as a function of time. The method is illustrated for a submicron double metal CMOS process in which many mixed standard cell and full custom designs are processed.
    Original languageEnglish
    Title of host publication5th European Symposium of Electron Devices, Failure Physics and Analysis
    Subtitle of host publicationGlasgow, Scotland, 4-7 October 1994
    Place of PublicationGlasgow, Scotland
    PublisherQaRel Associates
    Pages321-326
    Publication statusPublished - 1 Jun 1995
    Event5th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 1994 - Glasgow, Scotland, United Kingdom
    Duration: 4 Oct 19947 Oct 1994
    Conference number: 5

    Conference

    Conference5th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 1994
    Abbreviated titleESREF 1994
    Country/TerritoryUnited Kingdom
    CityGlasgow, Scotland
    Period4/10/947/10/94

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