Processing conditions for laser-induced subsurface modifications in Si

P.C. Verburg; Gerardus Richardus, Bernardus, Engelina Römer; Bert Huis in 't Veld

Processing conditions for laser-induced subsurface modifications in Si

P.C. Verburg, Gerardus Richardus, Bernardus, Engelina Römer, Bert Huis in 't Veld

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the LAMP2013-the 6th International Congress on Laser Advanced Materials Processing
Place of Publication	Niigata, Japan
Publisher	Nature Publishing Group
Pages	1-6
Publication status	Published - 23 Jul 2013
Event	LAMP2013-the 6th International Congress on Laser Advanced Materials Processing: Proceedings of the LAMP2013-the 6th International Congress on Laser Advanced Materials Processing - Niigata, Japan Duration: 23 Jul 2013 → 26 Jul 2013

Publication series

Name
Publisher	Nature Publishing Group

Conference

Conference	LAMP2013-the 6th International Congress on Laser Advanced Materials Processing
City	Niigata, Japan
Period	23/07/13 → 26/07/13

Keywords

METIS-300948
IR-88673

Cite this

@inproceedings{89a1e391b1f840acb52f2c4bc3a54e3b,

title = "Processing conditions for laser-induced subsurface modifications in Si",

keywords = "METIS-300948, IR-88673",

author = "P.C. Verburg and R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina} and {Huis in 't Veld}, Bert",

year = "2013",

month = jul,

day = "23",

language = "English",

publisher = "Nature Publishing Group",

pages = "1--6",

booktitle = "Proceedings of the LAMP2013-the 6th International Congress on Laser Advanced Materials Processing",

address = "United States",

note = "LAMP2013-the 6th International Congress on Laser Advanced Materials Processing : Proceedings of the LAMP2013-the 6th International Congress on Laser Advanced Materials Processing ; Conference date: 23-07-2013 Through 26-07-2013",

}

Verburg, PC, Römer, GRBE & Huis in 't Veld, B 2013, Processing conditions for laser-induced subsurface modifications in Si. in Proceedings of the LAMP2013-the 6th International Congress on Laser Advanced Materials Processing. Nature Publishing Group, Niigata, Japan, pp. 1-6, LAMP2013-the 6th International Congress on Laser Advanced Materials Processing, Niigata, Japan, 23/07/13.

Processing conditions for laser-induced subsurface modifications in Si. / Verburg, P.C.; Römer, Gerardus Richardus, Bernardus, Engelina; Huis in 't Veld, Bert.
Proceedings of the LAMP2013-the 6th International Congress on Laser Advanced Materials Processing. Niigata, Japan: Nature Publishing Group, 2013. p. 1-6.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Processing conditions for laser-induced subsurface modifications in Si

AU - Verburg, P.C.

AU - Römer, Gerardus Richardus, Bernardus, Engelina

AU - Huis in 't Veld, Bert

PY - 2013/7/23

Y1 - 2013/7/23

KW - METIS-300948

KW - IR-88673

M3 - Conference contribution

SP - 1

EP - 6

BT - Proceedings of the LAMP2013-the 6th International Congress on Laser Advanced Materials Processing

PB - Nature Publishing Group

CY - Niigata, Japan

T2 - LAMP2013-the 6th International Congress on Laser Advanced Materials Processing

Y2 - 23 July 2013 through 26 July 2013

ER -