Production of microsystems: characteristics of microsystem technology

J.H.J. Fluitman, C.I.M. Beenakker

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationMicrosystems Technology
    Subtitle of host publicationExploring opportunities
    EditorsGerben Klein Lebbink
    Place of PublicationAlphen aan den Rijn
    PublisherSamsom
    Pages227-231
    ISBN (Print)90-14-05088-7
    Publication statusPublished - 10 Jan 1994

    Publication series

    NameSTT
    PublisherStichting Toekomstbeeld der Techniek (SST)
    Number56

    Keywords

    • METIS-114083

    Cite this

    Fluitman, J. H. J., & Beenakker, C. I. M. (1994). Production of microsystems: characteristics of microsystem technology. In G. Klein Lebbink (Ed.), Microsystems Technology: Exploring opportunities (pp. 227-231). (STT; No. 56). Alphen aan den Rijn: Samsom.