Production of microsystems: characteristics of microsystem technology

J.H.J. Fluitman, C.I.M. Beenakker

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationMicrosystems Technology
    Subtitle of host publicationExploring opportunities
    EditorsGerben Klein Lebbink
    Place of PublicationAlphen aan den Rijn
    PublisherSamsom
    Pages227-231
    ISBN (Print)90-14-05088-7
    Publication statusPublished - 10 Jan 1994

    Publication series

    NameSTT
    PublisherStichting Toekomstbeeld der Techniek (SST)
    Number56

    Keywords

    • METIS-114083

    Cite this

    Fluitman, J. H. J., & Beenakker, C. I. M. (1994). Production of microsystems: characteristics of microsystem technology. In G. Klein Lebbink (Ed.), Microsystems Technology: Exploring opportunities (pp. 227-231). (STT; No. 56). Alphen aan den Rijn: Samsom.
    Fluitman, J.H.J. ; Beenakker, C.I.M. / Production of microsystems : characteristics of microsystem technology. Microsystems Technology: Exploring opportunities. editor / Gerben Klein Lebbink. Alphen aan den Rijn : Samsom, 1994. pp. 227-231 (STT; 56).
    @inproceedings{1f3fea10eaf14fcb832bee8d532df847,
    title = "Production of microsystems: characteristics of microsystem technology",
    keywords = "METIS-114083",
    author = "J.H.J. Fluitman and C.I.M. Beenakker",
    year = "1994",
    month = "1",
    day = "10",
    language = "English",
    isbn = "90-14-05088-7",
    series = "STT",
    publisher = "Samsom",
    number = "56",
    pages = "227--231",
    editor = "{Klein Lebbink}, Gerben",
    booktitle = "Microsystems Technology",

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    Fluitman, JHJ & Beenakker, CIM 1994, Production of microsystems: characteristics of microsystem technology. in G Klein Lebbink (ed.), Microsystems Technology: Exploring opportunities. STT, no. 56, Samsom, Alphen aan den Rijn, pp. 227-231.

    Production of microsystems : characteristics of microsystem technology. / Fluitman, J.H.J.; Beenakker, C.I.M.

    Microsystems Technology: Exploring opportunities. ed. / Gerben Klein Lebbink. Alphen aan den Rijn : Samsom, 1994. p. 227-231 (STT; No. 56).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Production of microsystems

    T2 - characteristics of microsystem technology

    AU - Fluitman, J.H.J.

    AU - Beenakker, C.I.M.

    PY - 1994/1/10

    Y1 - 1994/1/10

    KW - METIS-114083

    UR - https://stt.nl/stt-56-microsystem-technology-exploring-opportunities-1994/

    M3 - Conference contribution

    SN - 90-14-05088-7

    T3 - STT

    SP - 227

    EP - 231

    BT - Microsystems Technology

    A2 - Klein Lebbink, Gerben

    PB - Samsom

    CY - Alphen aan den Rijn

    ER -

    Fluitman JHJ, Beenakker CIM. Production of microsystems: characteristics of microsystem technology. In Klein Lebbink G, editor, Microsystems Technology: Exploring opportunities. Alphen aan den Rijn: Samsom. 1994. p. 227-231. (STT; 56).