Production of microsystems: characteristics of microsystem technology

J.H.J. Fluitman; C.I.M. Beenakker

Production of microsystems: characteristics of microsystem technology

J.H.J. Fluitman, C.I.M. Beenakker

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Microsystems Technology
Subtitle of host publication	Exploring opportunities
Editors	Gerben Klein Lebbink
Place of Publication	Alphen aan den Rijn
Publisher	Samsom
Pages	227-231
ISBN (Print)	90-14-05088-7
Publication status	Published - 10 Jan 1994

Publication series

Name	STT
Publisher	Stichting Toekomstbeeld der Techniek (SST)
Number	56

Keywords

METIS-114083

Cite this

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title = "Production of microsystems: characteristics of microsystem technology",

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author = "J.H.J. Fluitman and C.I.M. Beenakker",

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T2 - characteristics of microsystem technology

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AU - Beenakker, C.I.M.

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Y1 - 1994/1/10

KW - METIS-114083

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M3 - Conference contribution

SN - 90-14-05088-7

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A2 - Klein Lebbink, Gerben

PB - Samsom

CY - Alphen aan den Rijn

ER -

Production of microsystems: characteristics of microsystem technology

Publication series

Keywords

Other files and links

Cite this