Original language | English |
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Title of host publication | Microsystem Technology |
Subtitle of host publication | Exploring Opportunities |
Editors | Gerben Klein Lebbink |
Place of Publication | Alphen aan den Rijn |
Publisher | Samsom |
Pages | 234-234 |
ISBN (Print) | 90-14-05088-7 |
Publication status | Published - 10 Jan 1994 |
Publication series
Name | SST |
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Publisher | Stichting Toekomstbeeld der Techniek (SST) |
Number | 56 |
Keywords
- METIS-114082