| Original language | English |
|---|---|
| Title of host publication | Microsystem Technology |
| Subtitle of host publication | Exploring Opportunities |
| Editors | Gerben Klein Lebbink |
| Place of Publication | Alphen aan den Rijn |
| Publisher | Samsom |
| Pages | 239-240 |
| ISBN (Print) | 90-14-05088-7 |
| Publication status | Published - 10 Jan 1994 |
Publication series
| Name | STT |
|---|---|
| Publisher | Stichting Toekomstbeeld der Techniek (STT) |
| Number | 56 |
Keywords
- METIS-114081