Profile etching in silicon

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 11 Mar 1992
    EventSensortechnologie Conferentie & Workshop 1992: (STW Workshop Sensor Technology) - Koningshof, Veldhoven, Netherlands
    Duration: 11 Mar 199212 Mar 1992

    Conference

    ConferenceSensortechnologie Conferentie & Workshop 1992
    CountryNetherlands
    CityVeldhoven
    Period11/03/9212/03/92

    Keywords

    • METIS-118142

    Cite this

    Bomer, J. G., Olthuis, W., & Bergveld, P. (1992). Profile etching in silicon. -. Poster session presented at Sensortechnologie Conferentie & Workshop 1992, Veldhoven, Netherlands.