Propagation loss measurements in sputter coated titanium oxide waveguides

A. Aguirre Fontenla*, I. Hegeman, W. A.P.M. Hendriks, C. E. Osornio-Martínez, M. Dijkstra, S. M. García-Blanco

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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TiO2 is a very promising material for integrated photonics due to its high refractive index (∼2.3 at 633nm), wide transparency window from the visible to the mid-infrared and high non-linear refractive index. However, to date, high propagation losses hinder its utilization in real-life applications. In this work, we carry out a systematic study of the different fabrication processes involved in the realization of TiO2 channel waveguides, including RF sputter deposition, electron-beam lithography and thermal annealing, showing film losses below 1dB/cm for wavelengths above 633nm and channel losses of 1-1.5dB/cm at 1550nm.

Original languageEnglish
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XXVI
EditorsSonia M. Garcia-Blanco, Pavel Cheben
ISBN (Electronic)9781510648791
Publication statusPublished - 5 Mar 2022
EventIntegrated Optics: Devices, Materials, and Technologies XXVI 2022 - Virtual, Online
Duration: 20 Feb 202224 Feb 2022
Conference number: 26

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceIntegrated Optics: Devices, Materials, and Technologies XXVI 2022
CityVirtual, Online


  • Coupling
  • Low Loss
  • Simulation
  • Sputtering
  • Titanium Dioxide


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