Propagation loss measurements in sputter coated titanium oxide waveguides

A. Aguirre Fontenla; I. Hegeman; W. A.P.M. Hendriks; C. E. Osornio-Martínez; M. Dijkstra; S. M. García-Blanco

doi:10.1117/12.2610616

Propagation loss measurements in sputter coated titanium oxide waveguides

A. Aguirre Fontenla^*, I. Hegeman, W. A.P.M. Hendriks, C. E. Osornio-Martínez, M. Dijkstra, S. M. García-Blanco

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

TiO2 is a very promising material for integrated photonics due to its high refractive index (∼2.3 at 633nm), wide transparency window from the visible to the mid-infrared and high non-linear refractive index. However, to date, high propagation losses hinder its utilization in real-life applications. In this work, we carry out a systematic study of the different fabrication processes involved in the realization of TiO2 channel waveguides, including RF sputter deposition, electron-beam lithography and thermal annealing, showing film losses below 1dB/cm for wavelengths above 633nm and channel losses of 1-1.5dB/cm at 1550nm.

Original language	English
Title of host publication	Integrated Optics
Subtitle of host publication	Devices, Materials, and Technologies XXVI
Editors	Sonia M. Garcia-Blanco, Pavel Cheben
Publisher	SPIE
ISBN (Electronic)	9781510648791
DOIs	https://doi.org/10.1117/12.2610616
Publication status	Published - 5 Mar 2022
Event	Integrated Optics: Devices, Materials, and Technologies XXVI 2022 - Virtual, Online Duration: 20 Feb 2022 → 24 Feb 2022 Conference number: 26

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	12004
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Integrated Optics: Devices, Materials, and Technologies XXVI 2022
City	Virtual, Online
Period	20/02/22 → 24/02/22

Keywords

Coupling
Low Loss
Simulation
Sputtering
Titanium Dioxide

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Aguirre Fontenla, A., Hegeman, I., Hendriks, W. A. P. M., Osornio-Martínez, C. E., Dijkstra, M., & García-Blanco, S. M. (2022). Propagation loss measurements in sputter coated titanium oxide waveguides. In S. M. Garcia-Blanco, & P. Cheben (Eds.), Integrated Optics: Devices, Materials, and Technologies XXVI Article 1200403 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12004). SPIE. https://doi.org/10.1117/12.2610616

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title = "Propagation loss measurements in sputter coated titanium oxide waveguides",

abstract = "TiO2 is a very promising material for integrated photonics due to its high refractive index (∼2.3 at 633nm), wide transparency window from the visible to the mid-infrared and high non-linear refractive index. However, to date, high propagation losses hinder its utilization in real-life applications. In this work, we carry out a systematic study of the different fabrication processes involved in the realization of TiO2 channel waveguides, including RF sputter deposition, electron-beam lithography and thermal annealing, showing film losses below 1dB/cm for wavelengths above 633nm and channel losses of 1-1.5dB/cm at 1550nm. ",

keywords = "Coupling, Low Loss, Simulation, Sputtering, Titanium Dioxide",

author = "{Aguirre Fontenla}, A. and I. Hegeman and Hendriks, {W. A.P.M.} and Osornio-Mart{\'i}nez, {C. E.} and M. Dijkstra and Garc{\'i}a-Blanco, {S. M.}",

note = "Publisher Copyright: {\textcopyright} 2022 SPIE.; Integrated Optics: Devices, Materials, and Technologies XXVI 2022 ; Conference date: 20-02-2022 Through 24-02-2022",

year = "2022",

month = mar,

day = "5",

doi = "10.1117/12.2610616",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

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Aguirre Fontenla, A, Hegeman, I, Hendriks, WAPM , Osornio-Martínez, CE , Dijkstra, M & García-Blanco, SM 2022, Propagation loss measurements in sputter coated titanium oxide waveguides. in SM Garcia-Blanco & P Cheben (eds), Integrated Optics: Devices, Materials, and Technologies XXVI., 1200403, Proceedings of SPIE - The International Society for Optical Engineering, vol. 12004, SPIE, Integrated Optics: Devices, Materials, and Technologies XXVI 2022, Virtual, Online, 20/02/22. https://doi.org/10.1117/12.2610616

Propagation loss measurements in sputter coated titanium oxide waveguides. / Aguirre Fontenla, A.; Hegeman, I.; Hendriks, W. A.P.M. et al.
Integrated Optics: Devices, Materials, and Technologies XXVI. ed. / Sonia M. Garcia-Blanco; Pavel Cheben. SPIE, 2022. 1200403 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12004).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Propagation loss measurements in sputter coated titanium oxide waveguides

AU - Aguirre Fontenla, A.

AU - Hegeman, I.

AU - Hendriks, W. A.P.M.

AU - Osornio-Martínez, C. E.

AU - Dijkstra, M.

AU - García-Blanco, S. M.

N1 - Conference code: 26

PY - 2022/3/5

Y1 - 2022/3/5

N2 - TiO2 is a very promising material for integrated photonics due to its high refractive index (∼2.3 at 633nm), wide transparency window from the visible to the mid-infrared and high non-linear refractive index. However, to date, high propagation losses hinder its utilization in real-life applications. In this work, we carry out a systematic study of the different fabrication processes involved in the realization of TiO2 channel waveguides, including RF sputter deposition, electron-beam lithography and thermal annealing, showing film losses below 1dB/cm for wavelengths above 633nm and channel losses of 1-1.5dB/cm at 1550nm.

AB - TiO2 is a very promising material for integrated photonics due to its high refractive index (∼2.3 at 633nm), wide transparency window from the visible to the mid-infrared and high non-linear refractive index. However, to date, high propagation losses hinder its utilization in real-life applications. In this work, we carry out a systematic study of the different fabrication processes involved in the realization of TiO2 channel waveguides, including RF sputter deposition, electron-beam lithography and thermal annealing, showing film losses below 1dB/cm for wavelengths above 633nm and channel losses of 1-1.5dB/cm at 1550nm.

KW - Coupling

KW - Low Loss

KW - Simulation

KW - Sputtering

KW - Titanium Dioxide

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U2 - 10.1117/12.2610616

DO - 10.1117/12.2610616

M3 - Conference contribution

AN - SCOPUS:85131221368

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Integrated Optics

A2 - Garcia-Blanco, Sonia M.

A2 - Cheben, Pavel

PB - SPIE

T2 - Integrated Optics: Devices, Materials, and Technologies XXVI 2022

Y2 - 20 February 2022 through 24 February 2022

ER -

Aguirre Fontenla A, Hegeman I, Hendriks WAPM , Osornio-Martínez CE , Dijkstra M , García-Blanco SM. Propagation loss measurements in sputter coated titanium oxide waveguides. In Garcia-Blanco SM, Cheben P, editors, Integrated Optics: Devices, Materials, and Technologies XXVI. SPIE. 2022. 1200403. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2610616

Propagation loss measurements in sputter coated titanium oxide waveguides

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