Proportional control valves integrated in silicon nitride surface channel technology

Maarten Groen, Jarno Groenesteijn, Esken Meutstege, Robert Anton Brookhuis, Dannis Michel Brouwer, Joost Conrad Lötters, Remco J. Wiegerink

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Abstract

We have designed and realized two types of proportional microcontrol valves in a silicon nitride surface channel technology process. This enables on-die integration of flow controllers with other surface channel devices, such as pressure sensors or thermal or Coriolis-based (mass) flow sensors, to obtain a proportional gas flow control system on a single chip. One valve design is implemented with inlet and outlet channels in the plane of the chip, which allows on-chip flow control between several fluidic components and allows up to 70 mg h−1 of flow at 200 m bar. The other valve design operates out-of-plane between surface channels and a fluidic inlet, offering a flow range up to 1250 mg h−1 at 600 m bar, smaller footprint, and low-leakage closure. Measured flow behavior agrees well with laminar flow models created for both valve types.
Original languageUndefined
Pages (from-to)1759-1767
Number of pages9
JournalJournal of microelectromechanical systems
Volume24
Issue number6
DOIs
Publication statusPublished - 25 Jun 2015

Keywords

  • EWI-26569
  • IR-98714
  • METIS-313390
  • EC Grant Agreement nr.: FP7/2007-2013

Cite this

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title = "Proportional control valves integrated in silicon nitride surface channel technology",
abstract = "We have designed and realized two types of proportional microcontrol valves in a silicon nitride surface channel technology process. This enables on-die integration of flow controllers with other surface channel devices, such as pressure sensors or thermal or Coriolis-based (mass) flow sensors, to obtain a proportional gas flow control system on a single chip. One valve design is implemented with inlet and outlet channels in the plane of the chip, which allows on-chip flow control between several fluidic components and allows up to 70 mg h−1 of flow at 200 m bar. The other valve design operates out-of-plane between surface channels and a fluidic inlet, offering a flow range up to 1250 mg h−1 at 600 m bar, smaller footprint, and low-leakage closure. Measured flow behavior agrees well with laminar flow models created for both valve types.",
keywords = "EWI-26569, IR-98714, METIS-313390, EC Grant Agreement nr.: FP7/2007-2013",
author = "Maarten Groen and Jarno Groenesteijn and Esken Meutstege and Brookhuis, {Robert Anton} and Brouwer, {Dannis Michel} and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",
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Proportional control valves integrated in silicon nitride surface channel technology. / Groen, Maarten; Groenesteijn, Jarno; Meutstege, Esken; Brookhuis, Robert Anton; Brouwer, Dannis Michel; Lötters, Joost Conrad; Wiegerink, Remco J.

In: Journal of microelectromechanical systems, Vol. 24, No. 6, 25.06.2015, p. 1759-1767.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Proportional control valves integrated in silicon nitride surface channel technology

AU - Groen, Maarten

AU - Groenesteijn, Jarno

AU - Meutstege, Esken

AU - Brookhuis, Robert Anton

AU - Brouwer, Dannis Michel

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

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N2 - We have designed and realized two types of proportional microcontrol valves in a silicon nitride surface channel technology process. This enables on-die integration of flow controllers with other surface channel devices, such as pressure sensors or thermal or Coriolis-based (mass) flow sensors, to obtain a proportional gas flow control system on a single chip. One valve design is implemented with inlet and outlet channels in the plane of the chip, which allows on-chip flow control between several fluidic components and allows up to 70 mg h−1 of flow at 200 m bar. The other valve design operates out-of-plane between surface channels and a fluidic inlet, offering a flow range up to 1250 mg h−1 at 600 m bar, smaller footprint, and low-leakage closure. Measured flow behavior agrees well with laminar flow models created for both valve types.

AB - We have designed and realized two types of proportional microcontrol valves in a silicon nitride surface channel technology process. This enables on-die integration of flow controllers with other surface channel devices, such as pressure sensors or thermal or Coriolis-based (mass) flow sensors, to obtain a proportional gas flow control system on a single chip. One valve design is implemented with inlet and outlet channels in the plane of the chip, which allows on-chip flow control between several fluidic components and allows up to 70 mg h−1 of flow at 200 m bar. The other valve design operates out-of-plane between surface channels and a fluidic inlet, offering a flow range up to 1250 mg h−1 at 600 m bar, smaller footprint, and low-leakage closure. Measured flow behavior agrees well with laminar flow models created for both valve types.

KW - EWI-26569

KW - IR-98714

KW - METIS-313390

KW - EC Grant Agreement nr.: FP7/2007-2013

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