Proportional control valves integrated in silicon nitride surface channel technology
- Maarten Groen
- , Jarno Groenesteijn
- , Esken Meutstege
- , Robert Anton Brookhuis
- , Dannis Michel Brouwer
- , Joost Conrad Lötters
- , Remco J. Wiegerink
Research output: Contribution to journal › Article › Academic › peer-review
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