Proportional control valves integrated in silicon nitride surface channel technology

Maarten Groen, Jarno Groenesteijn, Esken Meutstege, Robert Anton Brookhuis, Dannis Michel Brouwer, Joost Conrad Lötters, Remco J. Wiegerink

    Research output: Contribution to journal › Article › Academic › peer-review

    4 Citations (Scopus)
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