Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines

Gijsbertus J.M. Krijnen; R.P. Haanstra; R. Haanstra; E. Potters; D.R. Potters; Johan W. Berenschot; S. Von Harrach; Michael Curt Elwenspoek

doi:10.1109/SENSOR.2003.1215304

Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines

Gijsbertus J.M. Krijnen, R.P. Haanstra, R. Haanstra, E. Potters, D.R. Potters, Johan W. Berenschot, S. Von Harrach, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

47 Downloads (Pure)

Abstract

We report on, to our best knowledge the first, protrud- ing electrostatic microgripper with force amplification and parallel jaw motion for in-situ manipulation of sub-mi- crometer thick membranes in combined Scanning Electron Microscopy (SEM) / Focussed Ion Beam (FIB) machines. The gripper is used “upside-down‿ such that the highly doped silicon substrate shields the electrical fields resulting from the electrostatic actuation. Mechanical amplification is used to attain 3 micro-meter jaw-displacement with up to 195 micro-Newton force from a comb-drive actuator array consisting of 1320 finger-pairs. Gripper movement was tested ex- and in-situ. The griper-jaws moved several microns in both cases. FIB images shifted slightly at 40 Volt actuation voltage but were undistorted showing the effectiveness of shielding.

Original language	Undefined
Title of host publication	Transducers 2003, The 12th international conference on solid state sensors, actuators and microsystems
Place of Publication	USA
Publisher	IEEE
Pages	268-271
Number of pages	4
ISBN (Print)	0-7803-7731-1
DOIs	https://doi.org/10.1109/SENSOR.2003.1215304
Publication status	Published - Jun 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003 Conference number: 12

Publication series

Name
Publisher	IEEE
Volume	1

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
Abbreviated title	TRANSDUCERS 2003
Country/Territory	United States
City	Boston
Period	8/06/03 → 12/06/03

Keywords

METIS-214519
IR-46304
EWI-25276

Access to Document

10.1109/SENSOR.2003.1215304

Krijnen_et_al._-_2003_-_Protruding_microgripper_with_force_amplification_and_parallel_jaw_motion_for_in-situ_sample_manipulation_in_SEM_and_FIB-machines

Cite this

Krijnen, G. J. M., Haanstra, R. P., Haanstra, R., Potters, E., Potters, D. R., Berenschot, J. W., Von Harrach, S., & Elwenspoek, M. C. (2003). Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines. In Transducers 2003, The 12th international conference on solid state sensors, actuators and microsystems (pp. 268-271). IEEE. https://doi.org/10.1109/SENSOR.2003.1215304

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title = "Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines",

abstract = "We report on, to our best knowledge the first, protrud- ing electrostatic microgripper with force amplification and parallel jaw motion for in-situ manipulation of sub-mi- crometer thick membranes in combined Scanning Electron Microscopy (SEM) / Focussed Ion Beam (FIB) machines. The gripper is used “upside-down‿ such that the highly doped silicon substrate shields the electrical fields resulting from the electrostatic actuation. Mechanical amplification is used to attain 3 micro-meter jaw-displacement with up to 195 micro-Newton force from a comb-drive actuator array consisting of 1320 finger-pairs. Gripper movement was tested ex- and in-situ. The griper-jaws moved several microns in both cases. FIB images shifted slightly at 40 Volt actuation voltage but were undistorted showing the effectiveness of shielding.",

keywords = "METIS-214519, IR-46304, EWI-25276",

author = "Krijnen, {Gijsbertus J.M.} and R.P. Haanstra and R. Haanstra and E. Potters and D.R. Potters and Berenschot, {Johan W.} and {Von Harrach}, S. and Elwenspoek, {Michael Curt}",

year = "2003",

month = jun,

doi = "10.1109/SENSOR.2003.1215304",

language = "Undefined",

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publisher = "IEEE",

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note = "null ; Conference date: 08-06-2003 Through 12-06-2003",

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Krijnen, GJM, Haanstra, RP, Haanstra, R, Potters, E, Potters, DR, Berenschot, JW, Von Harrach, S & Elwenspoek, MC 2003, Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines. in Transducers 2003, The 12th international conference on solid state sensors, actuators and microsystems. IEEE, USA, pp. 268-271, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, Massachusetts, United States, 8/06/03. https://doi.org/10.1109/SENSOR.2003.1215304

Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines. / Krijnen, Gijsbertus J.M.; Haanstra, R.P.; Haanstra, R. et al.

Transducers 2003, The 12th international conference on solid state sensors, actuators and microsystems. USA : IEEE, 2003. p. 268-271.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines

AU - Krijnen, Gijsbertus J.M.

AU - Haanstra, R.P.

AU - Haanstra, R.

AU - Potters, E.

AU - Potters, D.R.

AU - Berenschot, Johan W.

AU - Von Harrach, S.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 12

PY - 2003/6

Y1 - 2003/6

N2 - We report on, to our best knowledge the first, protrud- ing electrostatic microgripper with force amplification and parallel jaw motion for in-situ manipulation of sub-mi- crometer thick membranes in combined Scanning Electron Microscopy (SEM) / Focussed Ion Beam (FIB) machines. The gripper is used “upside-down‿ such that the highly doped silicon substrate shields the electrical fields resulting from the electrostatic actuation. Mechanical amplification is used to attain 3 micro-meter jaw-displacement with up to 195 micro-Newton force from a comb-drive actuator array consisting of 1320 finger-pairs. Gripper movement was tested ex- and in-situ. The griper-jaws moved several microns in both cases. FIB images shifted slightly at 40 Volt actuation voltage but were undistorted showing the effectiveness of shielding.

AB - We report on, to our best knowledge the first, protrud- ing electrostatic microgripper with force amplification and parallel jaw motion for in-situ manipulation of sub-mi- crometer thick membranes in combined Scanning Electron Microscopy (SEM) / Focussed Ion Beam (FIB) machines. The gripper is used “upside-down‿ such that the highly doped silicon substrate shields the electrical fields resulting from the electrostatic actuation. Mechanical amplification is used to attain 3 micro-meter jaw-displacement with up to 195 micro-Newton force from a comb-drive actuator array consisting of 1320 finger-pairs. Gripper movement was tested ex- and in-situ. The griper-jaws moved several microns in both cases. FIB images shifted slightly at 40 Volt actuation voltage but were undistorted showing the effectiveness of shielding.

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KW - IR-46304

KW - EWI-25276

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M3 - Conference contribution

SN - 0-7803-7731-1

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BT - Transducers 2003, The 12th international conference on solid state sensors, actuators and microsystems

PB - IEEE

CY - USA

Y2 - 8 June 2003 through 12 June 2003

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Krijnen GJM, Haanstra RP, Haanstra R, Potters E, Potters DR, Berenschot JW et al. Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines. In Transducers 2003, The 12th international conference on solid state sensors, actuators and microsystems. USA: IEEE. 2003. p. 268-271 doi: 10.1109/SENSOR.2003.1215304