We report on, to our best knowledge the first, protrud- ing electrostatic microgripper with force amplification and parallel jaw motion for in-situ manipulation of sub-mi- crometer thick membranes in combined Scanning Electron Microscopy (SEM) / Focussed Ion Beam (FIB) machines. The gripper is used “upside-down‿ such that the highly doped silicon substrate shields the electrical fields resulting from the electrostatic actuation. Mechanical amplification is used to attain 3 micro-meter jaw-displacement with up to 195 micro-Newton force from a comb-drive actuator array consisting of 1320 finger-pairs. Gripper movement was tested ex- and in-situ. The griper-jaws moved several microns in both cases. FIB images shifted slightly at 40 Volt actuation voltage but were undistorted showing the effectiveness of shielding.
|Conference||12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003|
|Abbreviated title||TRANSDUCERS 2003|
|Period||8/06/03 → 12/06/03|