Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines

Gijsbertus J.M. Krijnen, R.P. Haanstra, R. Haanstra, E. Potters, D.R. Potters, Johan W. Berenschot, S. Von Harrach, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)
    32 Downloads (Pure)

    Abstract

    We report on, to our best knowledge the first, protrud- ing electrostatic microgripper with force amplification and parallel jaw motion for in-situ manipulation of sub-mi- crometer thick membranes in combined Scanning Electron Microscopy (SEM) / Focussed Ion Beam (FIB) machines. The gripper is used “upside-down‿ such that the highly doped silicon substrate shields the electrical fields resulting from the electrostatic actuation. Mechanical amplification is used to attain 3 micro-meter jaw-displacement with up to 195 micro-Newton force from a comb-drive actuator array consisting of 1320 finger-pairs. Gripper movement was tested ex- and in-situ. The griper-jaws moved several microns in both cases. FIB images shifted slightly at 40 Volt actuation voltage but were undistorted showing the effectiveness of shielding.
    Original languageUndefined
    Title of host publicationTransducers 2003, The 12th international conference on solid state sensors, actuators and microsystems
    Place of PublicationUSA
    PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
    Pages268-271
    Number of pages4
    ISBN (Print)0-7803-7731-1
    DOIs
    Publication statusPublished - Jun 2003
    Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States
    Duration: 8 Jun 200312 Jun 2003
    Conference number: 12

    Publication series

    Name
    PublisherIEEE
    Volume1

    Conference

    Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
    Abbreviated titleTRANSDUCERS 2003
    CountryUnited States
    CityBoston
    Period8/06/0312/06/03

    Keywords

    • METIS-214519
    • IR-46304
    • EWI-25276

    Cite this