Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in sem and fib-machines

Gijsbertus J.M. Krijnen, R.P. Haanstra, R. Haanstra, E. Potters, D.R. Potters, Johan W. Berenschot, S. Von Harrach, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)
    32 Downloads (Pure)

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