Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation

H. Yagubizade; M. Darvishi; Y.Y. Chen; Duc Minh Nguyen; Jan M. Dekkers; Remco J. Wiegerink; Michael Curt Elwenspoek; Niels Roelof Tas

doi:10.1063/1.4792739

Pulsed-laser deposited Pb(Zr_0.52,Ti_0.48)O₃-on-silicon resonators with high-stopband rejection using feed-through cancellation

H. Yagubizade, M. Darvishi, Y.Y. Chen, Duc Minh Nguyen, Jan M. Dekkers, Remco J. Wiegerink, Michael Curt Elwenspoek, Niels Roelof Tas

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

A length extensional mode lead zirconate titanate (PZT)-on-Si resonator is presented using 50 Ω termination with high-stopband rejection exploiting feed-through cancellation. A 250-nm-thick (100)-dominant oriented PZT thin-film deposited on top of 3 µm Si using pulsed laser deposition has been used. The resonator is presented with the length of 40 µm (half-wavelength), which corresponds to a resonance frequency of about 83 MHz. The effect of feed-through cancellation has been studied to obtain high-stopband rejection using bottom electrode patterning in the presence of a specific grounding resistance. Using this technique, the stopband rejection can be improved by more than 20 dB.

Original language	Undefined
Article number	063509
Pages (from-to)	063509
Number of pages	4
Journal	Applied physics letters
Volume	102
Issue number	6
DOIs	https://doi.org/10.1063/1.4792739
Publication status	Published - 14 Feb 2013

Keywords

EWI-23112
Feed-through cancellation
TST-ACTUATORS
IR-84248
RF MEMS
PZT
METIS-294472
MEMS

Access to Document

10.1063/1.4792739

http://eprints.eemcs.utwente.nl/secure2/23112/01/HYagubizade_APL_2013.pdf

Cite this

@article{4a57ba7963014d0bbc346a7b6031272e,

title = "Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation",

abstract = "A length extensional mode lead zirconate titanate (PZT)-on-Si resonator is presented using 50 Ω termination with high-stopband rejection exploiting feed-through cancellation. A 250-nm-thick (100)-dominant oriented PZT thin-film deposited on top of 3 µm Si using pulsed laser deposition has been used. The resonator is presented with the length of 40 µm (half-wavelength), which corresponds to a resonance frequency of about 83 MHz. The effect of feed-through cancellation has been studied to obtain high-stopband rejection using bottom electrode patterning in the presence of a specific grounding resistance. Using this technique, the stopband rejection can be improved by more than 20 dB.",

keywords = "EWI-23112, Feed-through cancellation, TST-ACTUATORS, IR-84248, RF MEMS, PZT, METIS-294472, MEMS",

author = "H. Yagubizade and M. Darvishi and Y.Y. Chen and Nguyen, {Duc Minh} and Dekkers, {Jan M.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt} and Tas, {Niels Roelof}",

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doi = "10.1063/1.4792739",

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journal = "Applied physics letters",

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T1 - Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation

AU - Yagubizade, H.

AU - Darvishi, M.

AU - Chen, Y.Y.

AU - Nguyen, Duc Minh

AU - Dekkers, Jan M.

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

AU - Tas, Niels Roelof

N1 - http://eprints.ewi.utwente.nl/23112

PY - 2013/2/14

Y1 - 2013/2/14

N2 - A length extensional mode lead zirconate titanate (PZT)-on-Si resonator is presented using 50 Ω termination with high-stopband rejection exploiting feed-through cancellation. A 250-nm-thick (100)-dominant oriented PZT thin-film deposited on top of 3 µm Si using pulsed laser deposition has been used. The resonator is presented with the length of 40 µm (half-wavelength), which corresponds to a resonance frequency of about 83 MHz. The effect of feed-through cancellation has been studied to obtain high-stopband rejection using bottom electrode patterning in the presence of a specific grounding resistance. Using this technique, the stopband rejection can be improved by more than 20 dB.

AB - A length extensional mode lead zirconate titanate (PZT)-on-Si resonator is presented using 50 Ω termination with high-stopband rejection exploiting feed-through cancellation. A 250-nm-thick (100)-dominant oriented PZT thin-film deposited on top of 3 µm Si using pulsed laser deposition has been used. The resonator is presented with the length of 40 µm (half-wavelength), which corresponds to a resonance frequency of about 83 MHz. The effect of feed-through cancellation has been studied to obtain high-stopband rejection using bottom electrode patterning in the presence of a specific grounding resistance. Using this technique, the stopband rejection can be improved by more than 20 dB.

KW - EWI-23112

KW - Feed-through cancellation

KW - TST-ACTUATORS

KW - IR-84248

KW - RF MEMS

KW - PZT

KW - METIS-294472

KW - MEMS

U2 - 10.1063/1.4792739

DO - 10.1063/1.4792739

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SP - 063509

JO - Applied physics letters

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M1 - 063509

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