Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation

H. Yagubizade, M. Darvishi, Y.Y. Chen, Duc Minh Nguyen, Jan M. Dekkers, Remco J. Wiegerink, Michael Curt Elwenspoek, Niels Roelof Tas

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