The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.
|Number of pages||8|
|Journal||Applied surface science|
|Publication status||Published - 2 Apr 1996|
|Event||3rd International Conference on Laser Ablation, COLA 1995 - Strasbourg, France|
Duration: 22 May 1995 → 26 May 1995
Conference number: 3