Pulsed-laser deposited ZnO for device applications

Simon L. King; Johannes G.E. Gardeniers; Ian W. Boyd

doi:10.1016/0169-4332(96)80027-4

Pulsed-laser deposited ZnO for device applications

Simon L. King, Johannes G.E. Gardeniers, Ian W. Boyd

Faculty of Science and Technology

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.

Original language	English
Pages (from-to)	811-818
Number of pages	8
Journal	Applied surface science
Volume	96-98
DOIs	https://doi.org/10.1016/0169-4332(96)80027-4
Publication status	Published - 2 Apr 1996
Event	3rd International Conference on Laser Ablation, COLA 1995 - Strasbourg, France Duration: 22 May 1995 → 26 May 1995 Conference number: 3

Keywords

IR-14192
METIS-111483

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10.1016/0169-4332(96)80027-4

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title = "Pulsed-laser deposited ZnO for device applications",

abstract = "The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.",

keywords = "IR-14192, METIS-111483",

author = "King, {Simon L.} and Gardeniers, {Johannes G.E.} and Boyd, {Ian W.}",

year = "1996",

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doi = "10.1016/0169-4332(96)80027-4",

language = "English",

volume = "96-98",

pages = "811--818",

journal = "Applied surface science",

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publisher = "Elsevier B.V.",

note = "3rd International Conference on Laser Ablation, COLA 1995, COLA ; Conference date: 22-05-1995 Through 26-05-1995",

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TY - JOUR

T1 - Pulsed-laser deposited ZnO for device applications

AU - King, Simon L.

AU - Gardeniers, Johannes G.E.

AU - Boyd, Ian W.

N1 - Conference code: 3

PY - 1996/4/2

Y1 - 1996/4/2

N2 - The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.

AB - The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.

KW - IR-14192

KW - METIS-111483

U2 - 10.1016/0169-4332(96)80027-4

DO - 10.1016/0169-4332(96)80027-4

M3 - Article

SN - 0169-4332

VL - 96-98

SP - 811

EP - 818

JO - Applied surface science

JF - Applied surface science

T2 - 3rd International Conference on Laser Ablation, COLA 1995

Y2 - 22 May 1995 through 26 May 1995

ER -

Pulsed-laser deposited ZnO for device applications

Abstract

Keywords

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