Pulsed-laser deposited ZnO for device applications

Simon L. King, Johannes G.E. Gardeniers, Ian W. Boyd

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Abstract

The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.
Original languageEnglish
Pages (from-to)811-818
Number of pages8
JournalApplied surface science
Volume96-98
DOIs
Publication statusPublished - 2 Apr 1996
Event3rd International Conference on Laser Ablation, COLA 1995 - Strasbourg, France
Duration: 22 May 199526 May 1995
Conference number: 3

Keywords

  • IR-14192
  • METIS-111483

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