Pulsed laser deposition of dielectrics

David H.A. Blank, L.M. Doeswijk, K. Karakaya, Gertjan Koster, Augustinus J.H.M. Rijnders

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Name
Publisher	IOP Publishing Ltd.

Keywords

@inbook{91d2dbfc56634a31a20b2a801e58eb3d,

title = "Pulsed laser deposition of dielectrics",

keywords = "METIS-218557, IR-47717",

author = "Blank, {David H.A.} and L.M. Doeswijk and K. Karakaya and Gertjan Koster and Rijnders, {Augustinus J.H.M.}",

year = "2004",

language = "Undefined",

isbn = "0 7503 0906 7",

publisher = "Institute of Physics (IOP)",

pages = "89--122",

editor = "Michel Houssa",

booktitle = "High-K Gate Dielectric",

address = "United Kingdom",

}

TY - CHAP

T1 - Pulsed laser deposition of dielectrics

AU - Blank, David H.A.

AU - Doeswijk, L.M.

AU - Karakaya, K.

AU - Koster, Gertjan

AU - Rijnders, Augustinus J.H.M.

PY - 2004

Y1 - 2004

KW - METIS-218557

KW - IR-47717

M3 - Chapter

SN - 0 7503 0906 7

SP - 89

EP - 122

BT - High-K Gate Dielectric

A2 - Houssa, Michel

PB - Institute of Physics (IOP)

CY - London, United Kingdom

ER -