Pulsed laser deposition of dielectrics

David H.A. Blank, L.M. Doeswijk, K. Karakaya, Gertjan Koster, Augustinus J.H.M. Rijnders

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

Original languageUndefined
Title of host publicationHigh-K Gate Dielectric
EditorsMichel Houssa
Place of PublicationLondon, United Kingdom
PublisherIOP Publishing Ltd.
Pages89-122
Number of pages33
ISBN (Print)0 7503 0906 7
Publication statusPublished - 2004

Publication series

Name
PublisherIOP Publishing Ltd.

Keywords

  • METIS-218557
  • IR-47717

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