Pulsed Laser Deposition of Thin Al2O3 Layers for High-k Gate dielectric

R.G. Bankras, J. Holleman, P.H. Woerlee

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 3 Sep 2001

    Keywords

    • METIS-200749

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