| Original language | Undefined |
|---|---|
| Pages | - |
| Publication status | Published - 3 Sept 2001 |
Keywords
- METIS-200749
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Pulsed Laser Deposition of Thin Al2O3 Layers for High-k Gate dielectric
- R.G. Bankras
- , J. Holleman
- , P.H. Woerlee
Research output: Contribution to conference › Poster › Other research output