Pure boron-doped photodiodes: A solution for radiation detection in EUV lithography

F. Sarubbi*, L.K. Nanver, T. L.M. Scholtes, S.N. Nihtianov, F. Scholze

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

36 Citations (Scopus)

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Engineering & Materials Science