Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices

L. K. Nanver*, A. Sammak, V. Mohammadi, K. R.C. Mok, L. Qi, A. Šakic, N. Golshani, J. Derakhshandeh, T. M.L. Scholtes, W. B. De Boer

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

17 Citations (Scopus)

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Engineering & Materials Science