Pyramidal nanowire tip for atomic force microscopy and thermal imaging

Narges Burouni; Edin Sarajlic; Martin Siekman; Leon  Abelmann; Niels Tas

doi:10.1109/NEMS.2012.6196729

Pyramidal nanowire tip for atomic force microscopy and thermal imaging

Narges Burouni, Edin Sarajlic, Martin Siekman, Leon Abelmann, Niels Tas

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

11 Downloads (Pure)

Abstract

We present a novel 3D nanowire pyramid as scanning microscopy probe for thermal imaging and atomic force microscopy. This probe is fabricated by standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon nitride nanowires with a diameter of 60 nm. The nanowires, which are made of silicon nitride coated by metal, form an electrical cross junction at the apex of the tip, addressable through the electrodes integrated on the cantilever. The cross junction on the tip apex can be utilized to produce heat and detect local temperature changes. Electrical and thermal properties of the probe were experimentally determined. The temperature changes in the nanowires due to Joule heating can be sensed by measuring the resistance of the nanowires. We employed the scanning probe in an atomic force microscope.

Original language	English
Title of host publication	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Place of Publication	Los Alamitos, NJ
Publisher	IEEE
Pages	86-89
Number of pages	4
ISBN (Electronic)	978-1-4673-1124-3
ISBN (Print)	978-1-4673-1122-9
DOIs	https://doi.org/10.1109/NEMS.2012.6196729
Publication status	Published - 5 Mar 2012
Event	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan Duration: 5 Mar 2012 → 8 Mar 2012 Conference number: 7

Conference

Conference	7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Abbreviated title	NEMS
Country/Territory	Japan
City	Kyoto
Period	5/03/12 → 8/03/12

Keywords

EWI-23296
IR-85695
Joule heating
Electrical properties
novel 3D nanowire pyramid
electrical cross junction
freestanding silicon nitride nanowires
Thermal properties
temperature changes
tip apex
thermal imaging
cross junction
local temperature changes
conventional optical contact lithography
sharp pyramidal tip
size 60 nm
standard machining
scanning microscopy probe
AFM-type cantilever
Atomic Force Microscopy
METIS-296410
TSTNE-Probe-AFM: Atomic Force Microscope

Access to Document

10.1109/NEMS.2012.6196729

Cite this

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title = "Pyramidal nanowire tip for atomic force microscopy and thermal imaging",

abstract = "We present a novel 3D nanowire pyramid as scanning microscopy probe for thermal imaging and atomic force microscopy. This probe is fabricated by standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon nitride nanowires with a diameter of 60 nm. The nanowires, which are made of silicon nitride coated by metal, form an electrical cross junction at the apex of the tip, addressable through the electrodes integrated on the cantilever. The cross junction on the tip apex can be utilized to produce heat and detect local temperature changes. Electrical and thermal properties of the probe were experimentally determined. The temperature changes in the nanowires due to Joule heating can be sensed by measuring the resistance of the nanowires. We employed the scanning probe in an atomic force microscope.",

keywords = "EWI-23296, IR-85695, Joule heating, Electrical properties, novel 3D nanowire pyramid, electrical cross junction, freestanding silicon nitride nanowires, Thermal properties, temperature changes, tip apex, thermal imaging, cross junction, local temperature changes, conventional optical contact lithography, sharp pyramidal tip, size 60 nm, standard machining, scanning microscopy probe, AFM-type cantilever, Atomic Force Microscopy, METIS-296410, TSTNE-Probe-AFM: Atomic Force Microscope",

author = "Narges Burouni and Edin Sarajlic and Martin Siekman and Leon Abelmann and Niels Tas",

year = "2012",

month = mar,

day = "5",

doi = "10.1109/NEMS.2012.6196729",

language = "English",

isbn = "978-1-4673-1122-9",

pages = "86--89",

booktitle = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",

publisher = "IEEE",

address = "United States",

note = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, NEMS ; Conference date: 05-03-2012 Through 08-03-2012",

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Burouni, N, Sarajlic, E, Siekman, M , Abelmann, L & Tas, N 2012, Pyramidal nanowire tip for atomic force microscopy and thermal imaging. in 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. IEEE, Los Alamitos, NJ, pp. 86-89, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, 5/03/12. https://doi.org/10.1109/NEMS.2012.6196729

Pyramidal nanowire tip for atomic force microscopy and thermal imaging. / Burouni, Narges; Sarajlic, Edin; Siekman, Martin et al.
7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. Los Alamitos, NJ: IEEE, 2012. p. 86-89.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Pyramidal nanowire tip for atomic force microscopy and thermal imaging

AU - Burouni, Narges

AU - Sarajlic, Edin

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AU - Abelmann, Leon

AU - Tas, Niels

N1 - Conference code: 7

PY - 2012/3/5

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N2 - We present a novel 3D nanowire pyramid as scanning microscopy probe for thermal imaging and atomic force microscopy. This probe is fabricated by standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon nitride nanowires with a diameter of 60 nm. The nanowires, which are made of silicon nitride coated by metal, form an electrical cross junction at the apex of the tip, addressable through the electrodes integrated on the cantilever. The cross junction on the tip apex can be utilized to produce heat and detect local temperature changes. Electrical and thermal properties of the probe were experimentally determined. The temperature changes in the nanowires due to Joule heating can be sensed by measuring the resistance of the nanowires. We employed the scanning probe in an atomic force microscope.

AB - We present a novel 3D nanowire pyramid as scanning microscopy probe for thermal imaging and atomic force microscopy. This probe is fabricated by standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon nitride nanowires with a diameter of 60 nm. The nanowires, which are made of silicon nitride coated by metal, form an electrical cross junction at the apex of the tip, addressable through the electrodes integrated on the cantilever. The cross junction on the tip apex can be utilized to produce heat and detect local temperature changes. Electrical and thermal properties of the probe were experimentally determined. The temperature changes in the nanowires due to Joule heating can be sensed by measuring the resistance of the nanowires. We employed the scanning probe in an atomic force microscope.

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KW - IR-85695

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KW - freestanding silicon nitride nanowires

KW - Thermal properties

KW - temperature changes

KW - tip apex

KW - thermal imaging

KW - cross junction

KW - local temperature changes

KW - conventional optical contact lithography

KW - sharp pyramidal tip

KW - size 60 nm

KW - standard machining

KW - scanning microscopy probe

KW - AFM-type cantilever

KW - Atomic Force Microscopy

KW - METIS-296410

KW - TSTNE-Probe-AFM: Atomic Force Microscope

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DO - 10.1109/NEMS.2012.6196729

M3 - Conference contribution

SN - 978-1-4673-1122-9

SP - 86

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BT - 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

PB - IEEE

CY - Los Alamitos, NJ

T2 - 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Y2 - 5 March 2012 through 8 March 2012

ER -