Pyramidal nanowire tip for atomic force microscopy and thermal imaging

Narges Burouni, Edin Sarajlic, Martin Siekman, Leon Abelmann, Niels Tas

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    9 Downloads (Pure)

    Abstract

    We present a novel 3D nanowire pyramid as scanning microscopy probe for thermal imaging and atomic force microscopy. This probe is fabricated by standard micromachining and conventional optical contact lithography. The probe features an AFM-type cantilever with a sharp pyramidal tip composed of four freestanding silicon nitride nanowires with a diameter of 60 nm. The nanowires, which are made of silicon nitride coated by metal, form an electrical cross junction at the apex of the tip, addressable through the electrodes integrated on the cantilever. The cross junction on the tip apex can be utilized to produce heat and detect local temperature changes. Electrical and thermal properties of the probe were experimentally determined. The temperature changes in the nanowires due to Joule heating can be sensed by measuring the resistance of the nanowires. We employed the scanning probe in an atomic force microscope.
    Original languageEnglish
    Title of host publication7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
    Place of PublicationLos Alamitos, NJ
    PublisherIEEE
    Pages86-89
    Number of pages4
    ISBN (Electronic)978-1-4673-1124-3
    ISBN (Print)978-1-4673-1122-9
    DOIs
    Publication statusPublished - 5 Mar 2012
    Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
    Duration: 5 Mar 20128 Mar 2012
    Conference number: 7

    Conference

    Conference7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
    Abbreviated titleNEMS
    CountryJapan
    CityKyoto
    Period5/03/128/03/12

    Keywords

    • EWI-23296
    • IR-85695
    • Joule heating
    • Electrical properties
    • novel 3D nanowire pyramid
    • electrical cross junction
    • freestanding silicon nitride nanowires
    • Thermal properties
    • temperature changes
    • tip apex
    • thermal imaging
    • cross junction
    • local temperature changes
    • conventional optical contact lithography
    • sharp pyramidal tip
    • size 60 nm
    • standard machining
    • scanning microscopy probe
    • AFM-type cantilever
    • Atomic Force Microscopy
    • METIS-296410
    • TSTNE-Probe-AFM: Atomic Force Microscope

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