Q-factor and frequency shift of resonating silicon diaphragms

Albert Prak, Miko Elwenspoek, Theo S.J. Lammerink, T.J.A. Popma

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 1 Oct 1990
Event	4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany Duration: 1 Oct 1990 → 3 Oct 1990 Conference number: 4

Conference	4th European Conference on Solid-State Transducers, Eurosensors 1990
Abbreviated title	Eurosensors
Country/Territory	Germany
City	Karlsruhe
Period	1/10/90 → 3/10/90

Cite this

@conference{8bd6d5fb9c0a44bba5fe87629a9a6eff,

title = "Q-factor and frequency shift of resonating silicon diaphragms",

author = "Albert Prak and Miko Elwenspoek and Lammerink, {Theo S.J.} and T.J.A. Popma",

year = "1990",

month = oct,

day = "1",

language = "English",

note = "4th European Conference on Solid-State Transducers, Eurosensors 1990, Eurosensors ; Conference date: 01-10-1990 Through 03-10-1990",

}