Q-factor and frequency shift of resonating silicon diaphragms

Albert Prak, Miko Elwenspoek, Theo S.J. Lammerink, T.J.A. Popma

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Publication statusPublished - 1 Oct 1990
    Event4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany
    Duration: 1 Oct 19903 Oct 1990
    Conference number: 4

    Conference

    Conference4th European Conference on Solid-State Transducers, Eurosensors 1990
    Abbreviated titleEurosensors
    CountryGermany
    CityKarlsruhe
    Period1/10/903/10/90

    Cite this

    Prak, A., Elwenspoek, M., Lammerink, T. S. J., & Popma, T. J. A. (1990). Q-factor and frequency shift of resonating silicon diaphragms. Poster session presented at 4th European Conference on Solid-State Transducers, Eurosensors 1990, Karlsruhe, Germany.