Micromachined encapsulated polysilicon resonators have been fabricated in different reactive sealing pressure, 200, 50 and 20 mTorr, in order to investigate the dependence of the Q-factors on the sealing pressure. Q-factors as high as 2700 have been measured. The experimental results show that the Q-factors of one-port encapsulated resonators are proportional to 1/p and the resonant frequency is independent of the sealing pressure. However, the measured Q-factors are more than two orders of magnitude lower than theoretical prediction.
Gui, C., Legtenberg, R., Legtenberg, R., Elwenspoek, M. C., & Fluitman, J. H. J. (1995). Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of micromechanics and microengineering, 1995(5), 183-185. https://doi.org/10.1088/0960-1317/5/2/034