Quasi-buckling of micromachined beams

Ulf Lindberg, Jan Soderkvist, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    Abstract

    Buckling of structures with imperfections, quasi-buckling (QB), is studied. At the bifurcation load, these structures show a smooth transition into one of the stable postbuckling equilibrium states, instead of the traditional sudden change in deflection characteristics. Of course, QB structures can show the classical snap-through buckling behaviour, i.e., a sudden change of postbuckling equilibrium state. Here, the QB is described with a generalized temperature, Tg, representing the compression of the structure. Imperfections and distributed deflection loads are represented by a generalized pressure, pg. Experiments on micromachined beams, exposed to heating (Tg) and to a Lorentz force (pg), verify that the QB phenomena can efficiently transfer a longitudinal stress into a transversal deflection, with a scale-factor depending on both Tg and pg. Also, a pg-guided snap-through can be eased by reducing Tg during the snap-through.
    Original languageUndefined
    Pages (from-to)183-186
    Number of pages4
    JournalJournal of micromechanics and microengineering
    Volume3
    Issue number4
    DOIs
    Publication statusPublished - Dec 1993

    Keywords

    • IR-56027
    • EWI-14128

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