Quasi-buckling of micromachined beams

U.H.F. Lindberg, J. Soderkvist, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationNeuchatel
    Publication statusPublished - 7 Sep 1993

    Keywords

    • METIS-117999

    Cite this

    Lindberg, U. H. F., Soderkvist, J., Lammerink, T. S. J., & Elwenspoek, M. C. (1993, Sep 7). Quasi-buckling of micromachined beams. Neuchatel.
    @misc{ba9f0dd07f964ee898f3928308af2579,
    title = "Quasi-buckling of micromachined beams",
    keywords = "METIS-117999",
    author = "U.H.F. Lindberg and J. Soderkvist and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
    year = "1993",
    month = "9",
    day = "7",
    language = "Undefined",
    type = "Other",

    }

    Lindberg, UHF, Soderkvist, J, Lammerink, TSJ & Elwenspoek, MC 1993, Quasi-buckling of micromachined beams. Neuchatel.

    Quasi-buckling of micromachined beams. / Lindberg, U.H.F.; Soderkvist, J.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

    Neuchatel. 1993, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Quasi-buckling of micromachined beams

    AU - Lindberg, U.H.F.

    AU - Soderkvist, J.

    AU - Lammerink, Theodorus S.J.

    AU - Elwenspoek, Michael Curt

    PY - 1993/9/7

    Y1 - 1993/9/7

    KW - METIS-117999

    M3 - Other contribution

    CY - Neuchatel

    ER -