Quasi-buckling of micromachined beams

U.H.F. Lindberg, J. Soderkvist, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationNeuchatel
    Publication statusPublished - 7 Sep 1993

    Keywords

    • METIS-117999

    Cite this

    Lindberg, U. H. F., Soderkvist, J., Lammerink, T. S. J., & Elwenspoek, M. C. (1993, Sep 7). Quasi-buckling of micromachined beams. Neuchatel.