Quasi-buckling of micromachined beams

U.H.F. Lindberg, J. Soderkvist, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationNeuchatel
    Publication statusPublished - 7 Sep 1993

    Keywords

    • METIS-117999

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