| Original language | Undefined |
|---|---|
| Place of Publication | Neuchatel |
| Publication status | Published - 7 Sept 1993 |
Keywords
- METIS-117999
Quasi-buckling of micromachined beams
- U.H.F. Lindberg
- , J. Soderkvist
- , Theodorus S.J. Lammerink
- , Michael Curt Elwenspoek
Research output: Other contribution › Other research output