Quasi-buckling of micromachined beams

U.H.F. Lindberg, J. Soderkvist, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    15 Citations (Scopus)
    Original languageUndefined
    Title of host publication4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93)
    Place of PublicationNeuchatel, Switzerland
    Pages115-118
    Publication statusPublished - 7 Sep 1993

    Keywords

    • METIS-114139

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