Quasi-buckling of micromachined beams

U.H.F. Lindberg, J. Soderkvist, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93)
Place of Publication	Neuchatel, Switzerland
Pages	115-118
Publication status	Published - 7 Sep 1993

Keywords

@inproceedings{18a6d695cee245deae036a34f0300d66,

title = "Quasi-buckling of micromachined beams",

keywords = "METIS-114139",

author = "U.H.F. Lindberg and J. Soderkvist and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1993",

month = sep,

day = "7",

language = "Undefined",

pages = "115--118",

booktitle = "4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93)",

}