Original language | Undefined |
---|---|
Title of host publication | 4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93) |
Place of Publication | Neuchatel, Switzerland |
Pages | 115-118 |
Publication status | Published - 7 Sep 1993 |
Keywords
- METIS-114139
U.H.F. Lindberg, J. Soderkvist, Theodorus S.J. Lammerink, Michael Curt Elwenspoek
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | 4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93) |
Place of Publication | Neuchatel, Switzerland |
Pages | 115-118 |
Publication status | Published - 7 Sep 1993 |