Quasi monolithic load cell

Remco J. Wiegerink (Inventor), A.F. Zwijze (Inventor), Gijsbertus J.M. Krijnen (Inventor), Theodorus S.J. Lammerink (Inventor), Michael Curt Elwenspoek (Inventor)

Research output: Patent

Original languageUndefined
Patent number1e Nederland
Priority date27/09/00
Publication statusSubmitted - 27 Sep 2000

Keywords

  • METIS-118348

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