Quasi-monolithic planar load cells using built-in resonant strain gauges

H.A.C. Tilmans, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    1 Citation (Scopus)
    Original languageUndefined
    Place of PublicationNeuchatel
    Publication statusPublished - 7 Sep 1993

    Keywords

    • METIS-117991

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