Quasi-monolithic planar load cells using built-in resonant strain gauges

H.A.C. Tilmans, Michael Curt Elwenspoek

    Research output: Other contribution › Other research output

    2 Citations (Scopus)
    Original languageUndefined
    Place of PublicationNeuchatel
    Publication statusPublished - 7 Sept 1993

    Keywords

    • METIS-117991

    Cite this