Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

Remco J. Wiegerink; A.F. Zwijze; R. Mateman; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

Remco J. Wiegerink, A.F. Zwijze, R. Mateman, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII)
Editors	M. Bartek
Place of Publication	Den Haag
Publisher	Delft University of Technology
Pages	-
Publication status	Published - 12 Sep 1999

Publication series

Name
Publisher	Delft University of Technology

Keywords

METIS-112712
IR-15830

Cite this

Wiegerink, R. J., Zwijze, A. F., Mateman, R., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (1999). Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. In M. Bartek (Ed.), Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII) (pp. -). Den Haag: Delft University of Technology.

Wiegerink, Remco J. ; Zwijze, A.F. ; Mateman, R. ; Krijnen, Gijsbertus J.M. ; Lammerink, Theodorus S.J. ; Elwenspoek, Michael Curt. / Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII). editor / M. Bartek. Den Haag : Delft University of Technology, 1999. pp. -

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title = "Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing",

keywords = "METIS-112712, IR-15830",

author = "Wiegerink, {Remco J.} and A.F. Zwijze and R. Mateman and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = "9",

day = "12",

language = "Undefined",

publisher = "Delft University of Technology",

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editor = "M. Bartek",

booktitle = "Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII)",

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Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. / Wiegerink, Remco J.; Zwijze, A.F.; Mateman, R.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII). ed. / M. Bartek. Den Haag : Delft University of Technology, 1999. p. -.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

AU - Wiegerink, Remco J.

AU - Zwijze, A.F.

AU - Mateman, R.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 1999/9/12

Y1 - 1999/9/12

KW - METIS-112712

KW - IR-15830

M3 - Conference contribution

SP - -

BT - Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII)

A2 - Bartek, M.

PB - Delft University of Technology

CY - Den Haag

ER -