Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

Remco J. Wiegerink, A.F. Zwijze, R. Mateman, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII)
    EditorsM. Bartek
    Place of PublicationDen Haag
    PublisherDelft University of Technology
    Pages-
    Publication statusPublished - 12 Sep 1999

    Publication series

    Name
    PublisherDelft University of Technology

    Keywords

    • METIS-112712
    • IR-15830

    Cite this

    Wiegerink, R. J., Zwijze, A. F., Mateman, R., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (1999). Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. In M. Bartek (Ed.), Proceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII) (pp. -). Den Haag: Delft University of Technology.