Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing

Remco J. Wiegerink, A.F. Zwijze, R. Mateman, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of 13th European Conference on Solid-State Transducers (Eurosensors XIII)
    EditorsM. Bartek
    Place of PublicationDen Haag
    PublisherDelft University of Technology
    Pages-
    Publication statusPublished - 12 Sep 1999
    Event13th European Conference on Solid-State Transducers, EUROSENSORS XIII - The Hague, The Netherlands, Den Haag
    Duration: 12 Sep 199915 Sep 1999

    Publication series

    Name
    PublisherDelft University of Technology

    Conference

    Conference13th European Conference on Solid-State Transducers, EUROSENSORS XIII
    CityDen Haag
    Period12/09/9915/09/99
    OtherSeptember 12-15, 1999

    Keywords

    • METIS-112712
    • IR-15830

    Cite this