Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

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    Abstract

    n this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible
    Original languageUndefined
    Title of host publicationProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
    Place of PublicationPiscataway
    PublisherIEEE
    Pages558-563
    Number of pages6
    ISBN (Print)0-7803-5194-0
    DOIs
    Publication statusPublished - 17 Jan 1999
    Event12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States
    Duration: 17 Jan 199921 Jan 1999
    Conference number: 12

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
    Abbreviated titleMEMS
    CountryUnited States
    CityOrlando
    Period17/01/9921/01/99

    Keywords

    • IR-15820
    • METIS-112702
    • EWI-13226

    Cite this

    Wiegerink, R. J., Zwijze, A. F., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (1999). Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. In Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS (pp. 558-563). Piscataway: IEEE. https://doi.org/10.1109/MEMSYS.1999.746889