@article{abbe132787eb4a66bf109e1f57b2fe2e,
title = "Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions",
abstract = "In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.",
keywords = "2023 OA procedure",
author = "Remco Wiegerink and Robert Zwijze and Gijs Krijnen and Theo Lammerink and Miko Elwenspoek",
year = "2000",
month = mar,
doi = "10.1016/S0924-4247(99)00265-4",
language = "English",
volume = "80",
pages = "189--196",
journal = "Sensors and actuators. A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",
}