Abstract
Original language | Undefined |
---|---|
Pages (from-to) | 189-196 |
Number of pages | 8 |
Journal | Sensors and actuators. A: Physical |
Volume | A80 |
Issue number | 2 |
DOIs | |
Publication status | Published - Mar 2000 |
Keywords
- IR-14626
- METIS-111705
- EWI-13158
Cite this
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Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. / Wiegerink, Remco J.; Zwijze, A.F.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.
In: Sensors and actuators. A: Physical, Vol. A80, No. 2, 03.2000, p. 189-196.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions
AU - Wiegerink, Remco J.
AU - Zwijze, A.F.
AU - Krijnen, Gijsbertus J.M.
AU - Lammerink, Theodorus S.J.
AU - Elwenspoek, Michael Curt
PY - 2000/3
Y1 - 2000/3
N2 - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.
AB - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.
KW - IR-14626
KW - METIS-111705
KW - EWI-13158
U2 - 10.1016/S0924-4247(99)00265-4
DO - 10.1016/S0924-4247(99)00265-4
M3 - Article
VL - A80
SP - 189
EP - 196
JO - Sensors and actuators. A: Physical
JF - Sensors and actuators. A: Physical
SN - 0924-4247
IS - 2
ER -