Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Remco J. Wiegerink, A.F. Zwijze, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

11 Citations (Scopus)
1 Downloads (Pure)

Abstract

In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.
Original languageUndefined
Pages (from-to)189-196
Number of pages8
JournalSensors and actuators. A: Physical
VolumeA80
Issue number2
DOIs
Publication statusPublished - Mar 2000

Keywords

  • IR-14626
  • METIS-111705
  • EWI-13158

Cite this

Wiegerink, Remco J. ; Zwijze, A.F. ; Krijnen, Gijsbertus J.M. ; Lammerink, Theodorus S.J. ; Elwenspoek, Michael Curt. / Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. In: Sensors and actuators. A: Physical. 2000 ; Vol. A80, No. 2. pp. 189-196.
@article{abbe132787eb4a66bf109e1f57b2fe2e,
title = "Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions",
abstract = "In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2{\%} of full scale limited by the measurement electronics. An accuracy of 0.03{\%} or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.",
keywords = "IR-14626, METIS-111705, EWI-13158",
author = "Wiegerink, {Remco J.} and A.F. Zwijze and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
year = "2000",
month = "3",
doi = "10.1016/S0924-4247(99)00265-4",
language = "Undefined",
volume = "A80",
pages = "189--196",
journal = "Sensors and actuators. A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",

}

Wiegerink, RJ, Zwijze, AF, Krijnen, GJM, Lammerink, TSJ & Elwenspoek, MC 2000, 'Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions' Sensors and actuators. A: Physical, vol. A80, no. 2, pp. 189-196. https://doi.org/10.1016/S0924-4247(99)00265-4

Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. / Wiegerink, Remco J.; Zwijze, A.F.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

In: Sensors and actuators. A: Physical, Vol. A80, No. 2, 03.2000, p. 189-196.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

AU - Wiegerink, Remco J.

AU - Zwijze, A.F.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2000/3

Y1 - 2000/3

N2 - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.

AB - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.

KW - IR-14626

KW - METIS-111705

KW - EWI-13158

U2 - 10.1016/S0924-4247(99)00265-4

DO - 10.1016/S0924-4247(99)00265-4

M3 - Article

VL - A80

SP - 189

EP - 196

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

SN - 0924-4247

IS - 2

ER -

Wiegerink RJ, Zwijze AF, Krijnen GJM, Lammerink TSJ, Elwenspoek MC. Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and actuators. A: Physical. 2000 Mar;A80(2):189-196. https://doi.org/10.1016/S0924-4247(99)00265-4

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