Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Remco J. Wiegerink; A.F. Zwijze; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.1999.746889

Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Remco J. Wiegerink
, A.F. Zwijze
, Gijsbertus J.M. Krijnen
, Theodorus S.J. Lammerink
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

304 Downloads (Pure)

Abstract

n this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible

Original language	Undefined
Title of host publication	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
Place of Publication	Piscataway
Publisher	IEEE
Pages	558-563
Number of pages	6
ISBN (Print)	0-7803-5194-0
DOIs	https://doi.org/10.1109/MEMSYS.1999.746889
Publication status	Published - 17 Jan 1999
Event	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States Duration: 17 Jan 1999 → 21 Jan 1999 Conference number: 12

Publication series

Name
Publisher	IEEE

Conference

Conference	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated title	MEMS
Country/Territory	United States
City	Orlando
Period	17/01/99 → 21/01/99

Keywords

IR-15820
METIS-112702
EWI-13226

Access to Document

10.1109/MEMSYS.1999.746889

5 Citations
1 Article

Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions
Wiegerink, R., Zwijze, R., Krijnen, G., Lammerink, T. & Elwenspoek, M., Mar 2000, In: Sensors and Actuators A: Physical. 80, 2, p. 189-196 8 p.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
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13 Citations (Scopus)

92 Downloads (Pure)

Cite this

Wiegerink, R. J., Zwijze, A. F., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (1999). Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. In Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS (pp. 558-563). IEEE. https://doi.org/10.1109/MEMSYS.1999.746889

@inproceedings{4fb1146c739649cca293136f0fd4dbdc,

title = "Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions",

abstract = "n this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2\% of full scale limited by the measurement electronics. An accuracy of 0.03\% or better is expected to be feasible",

keywords = "IR-15820, METIS-112702, EWI-13226",

author = "Wiegerink, \{Remco J.\} and A.F. Zwijze and Krijnen, \{Gijsbertus J.M.\} and Lammerink, \{Theodorus S.J.\} and Elwenspoek, \{Michael Curt\}",

year = "1999",

month = jan,

day = "17",

doi = "10.1109/MEMSYS.1999.746889",

language = "Undefined",

isbn = "0-7803-5194-0",

publisher = "IEEE",

pages = "558--563",

booktitle = "Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS",

address = "United States",

note = "12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 ; Conference date: 17-01-1999 Through 21-01-1999",

}

Wiegerink, RJ, Zwijze, AF, Krijnen, GJM, Lammerink, TSJ & Elwenspoek, MC 1999, Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. in Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. IEEE, Piscataway, pp. 558-563, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, Florida, United States, 17/01/99. https://doi.org/10.1109/MEMSYS.1999.746889

Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. / Wiegerink, Remco J.; Zwijze, A.F.; Krijnen, Gijsbertus J.M. et al.
Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE, 1999. p. 558-563.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

AU - Wiegerink, Remco J.

AU - Zwijze, A.F.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 12

PY - 1999/1/17

Y1 - 1999/1/17

N2 - n this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible

AB - n this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible

KW - IR-15820

KW - METIS-112702

KW - EWI-13226

U2 - 10.1109/MEMSYS.1999.746889

DO - 10.1109/MEMSYS.1999.746889

M3 - Conference contribution

SN - 0-7803-5194-0

SP - 558

EP - 563

BT - Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS

PB - IEEE

CY - Piscataway

T2 - 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999

Y2 - 17 January 1999 through 21 January 1999

ER -

Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Abstract

Publication series

Conference

Keywords

Access to Document

Research output

Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Cite this