Questions and answers about tungsten LPCVD

A. Hasper, J. Holleman, J. Middelhoek

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 29 Nov 1990
    EventFOM Werkgemeenschap Halfgeleiders 1990 - Veldhoven, Netherlands
    Duration: 28 Nov 199029 Nov 1990

    Conference

    ConferenceFOM Werkgemeenschap Halfgeleiders 1990
    CountryNetherlands
    CityVeldhoven
    Period28/11/9029/11/90

    Keywords

    • METIS-117180

    Cite this

    Hasper, A., Holleman, J., & Middelhoek, J. (1990). Questions and answers about tungsten LPCVD. -. Poster session presented at FOM Werkgemeenschap Halfgeleiders 1990, Veldhoven, Netherlands.