Radiation pressure sensor

M. Karuza; D. Bozicevic; G. Cantatore; M. Vretenar

doi:10.23919/MIPRO48935.2020.9245357

Radiation pressure sensor

M. Karuza^*
, D. Bozicevic
, G. Cantatore
, M. Vretenar

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

113 Downloads (Pure)

Abstract

Mechanical elements with dimensions in the nanometer range, at least in one direction, have been successfully employed as sensors in various devices. Their mechanical properties must be known with maximum precision in order to quantify the sensor response to external excitation. This often poses a significant challenge due to the mechanical fragility of the sensor elements. Here we present a measurement of the mechanical response of a 100 nm thick silicon nitride membrane. The external excitation force is provided by a laser beam modulated in amplitude, while the displacement of the membrane is measured by a Michelson interferometer with a homodyne readout.

Original language	English
Title of host publication	2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings
Editors	Marko Koricic, Karolj Skala, Zeljka Car, Marina Cicin-Sain, Vlado Sruk, Dejan Skvorc, Slobodan Ribaric, Bojan Jerbic, Stjepan Gros, Boris Vrdoljak, Mladen Mauher, Edvard Tijan, Tihomir Katulic, Predrag Pale, Tihana Galinac Grbac, Nikola Filip Fijan, Adrian Boukalov, Dragan Cisic, Vera Gradisnik
Publisher	IEEE
Pages	1890-1893
Number of pages	4
ISBN (Electronic)	9789532330991
DOIs	https://doi.org/10.23919/MIPRO48935.2020.9245357
Publication status	Published - 28 Sept 2020
Event	43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Opatija, Croatia Duration: 28 Sept 2020 → 2 Oct 2020 Conference number: 43

Conference

Conference	43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020
Abbreviated title	MIPRO 2020
Country/Territory	Croatia
City	Opatija
Period	28/09/20 → 2/10/20

Keywords

Mechanical impedance
Mechanical resonator
Radiation pressure
Sensor
22/2 OA procedure

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10.23919/MIPRO48935.2020.9245357

Karuza-2020-Radiation-pressure-sensorFinal published version, 848 KBLicence: Taverne

Cite this

Karuza, M., Bozicevic, D., Cantatore, G., & Vretenar, M. (2020). Radiation pressure sensor. In M. Koricic, K. Skala, Z. Car, M. Cicin-Sain, V. Sruk, D. Skvorc, S. Ribaric, B. Jerbic, S. Gros, B. Vrdoljak, M. Mauher, E. Tijan, T. Katulic, P. Pale, T. G. Grbac, N. F. Fijan, A. Boukalov, D. Cisic, & V. Gradisnik (Eds.), 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings (pp. 1890-1893). Article 9245357 IEEE. https://doi.org/10.23919/MIPRO48935.2020.9245357

Karuza, M. ; Bozicevic, D. ; Cantatore, G. et al. / Radiation pressure sensor. 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings. editor / Marko Koricic ; Karolj Skala ; Zeljka Car ; Marina Cicin-Sain ; Vlado Sruk ; Dejan Skvorc ; Slobodan Ribaric ; Bojan Jerbic ; Stjepan Gros ; Boris Vrdoljak ; Mladen Mauher ; Edvard Tijan ; Tihomir Katulic ; Predrag Pale ; Tihana Galinac Grbac ; Nikola Filip Fijan ; Adrian Boukalov ; Dragan Cisic ; Vera Gradisnik. IEEE, 2020. pp. 1890-1893

@inproceedings{44a490aa608c41a3ab96d1454a4ea51d,

title = "Radiation pressure sensor",

abstract = "Mechanical elements with dimensions in the nanometer range, at least in one direction, have been successfully employed as sensors in various devices. Their mechanical properties must be known with maximum precision in order to quantify the sensor response to external excitation. This often poses a significant challenge due to the mechanical fragility of the sensor elements. Here we present a measurement of the mechanical response of a 100 nm thick silicon nitride membrane. The external excitation force is provided by a laser beam modulated in amplitude, while the displacement of the membrane is measured by a Michelson interferometer with a homodyne readout.",

keywords = "Mechanical impedance, Mechanical resonator, Radiation pressure, Sensor, 22/2 OA procedure",

author = "M. Karuza and D. Bozicevic and G. Cantatore and M. Vretenar",

note = "Funding Information: ACKNOWLEDGMENT We acknowledge support from University of Rijeka with grant no 13.12.2.2.09, 18-126, EU fund projects KK.01.1.1.01.0001 and RC.2.2.06.-0001. The authors express their gratitude to the colleagues of the INFN Sezione di Trieste mechanical workshop where parts of the detector were built. Publisher Copyright: {\textcopyright} 2020 Croatian Society MIPRO.; 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020, MIPRO 2020 ; Conference date: 28-09-2020 Through 02-10-2020",

year = "2020",

month = sep,

day = "28",

doi = "10.23919/MIPRO48935.2020.9245357",

language = "English",

pages = "1890--1893",

editor = "Marko Koricic and Karolj Skala and Zeljka Car and Marina Cicin-Sain and Vlado Sruk and Dejan Skvorc and Slobodan Ribaric and Bojan Jerbic and Stjepan Gros and Boris Vrdoljak and Mladen Mauher and Edvard Tijan and Tihomir Katulic and Predrag Pale and Grbac, \{Tihana Galinac\} and Fijan, \{Nikola Filip\} and Adrian Boukalov and Dragan Cisic and Vera Gradisnik",

booktitle = "2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings",

publisher = "IEEE",

address = "United States",

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Karuza, M, Bozicevic, D, Cantatore, G & Vretenar, M 2020, Radiation pressure sensor. in M Koricic, K Skala, Z Car, M Cicin-Sain, V Sruk, D Skvorc, S Ribaric, B Jerbic, S Gros, B Vrdoljak, M Mauher, E Tijan, T Katulic, P Pale, TG Grbac, NF Fijan, A Boukalov, D Cisic & V Gradisnik (eds), 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings., 9245357, IEEE, pp. 1890-1893, 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020, Opatija, Croatia, 28/09/20. https://doi.org/10.23919/MIPRO48935.2020.9245357

Radiation pressure sensor. / Karuza, M.; Bozicevic, D.; Cantatore, G. et al.
2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings. ed. / Marko Koricic; Karolj Skala; Zeljka Car; Marina Cicin-Sain; Vlado Sruk; Dejan Skvorc; Slobodan Ribaric; Bojan Jerbic; Stjepan Gros; Boris Vrdoljak; Mladen Mauher; Edvard Tijan; Tihomir Katulic; Predrag Pale; Tihana Galinac Grbac; Nikola Filip Fijan; Adrian Boukalov; Dragan Cisic; Vera Gradisnik. IEEE, 2020. p. 1890-1893 9245357.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Radiation pressure sensor

AU - Karuza, M.

AU - Bozicevic, D.

AU - Cantatore, G.

AU - Vretenar, M.

N1 - Conference code: 43

PY - 2020/9/28

Y1 - 2020/9/28

N2 - Mechanical elements with dimensions in the nanometer range, at least in one direction, have been successfully employed as sensors in various devices. Their mechanical properties must be known with maximum precision in order to quantify the sensor response to external excitation. This often poses a significant challenge due to the mechanical fragility of the sensor elements. Here we present a measurement of the mechanical response of a 100 nm thick silicon nitride membrane. The external excitation force is provided by a laser beam modulated in amplitude, while the displacement of the membrane is measured by a Michelson interferometer with a homodyne readout.

AB - Mechanical elements with dimensions in the nanometer range, at least in one direction, have been successfully employed as sensors in various devices. Their mechanical properties must be known with maximum precision in order to quantify the sensor response to external excitation. This often poses a significant challenge due to the mechanical fragility of the sensor elements. Here we present a measurement of the mechanical response of a 100 nm thick silicon nitride membrane. The external excitation force is provided by a laser beam modulated in amplitude, while the displacement of the membrane is measured by a Michelson interferometer with a homodyne readout.

KW - Mechanical impedance

KW - Mechanical resonator

KW - Radiation pressure

KW - Sensor

KW - 22/2 OA procedure

UR - https://www.scopus.com/pages/publications/85097221890

U2 - 10.23919/MIPRO48935.2020.9245357

DO - 10.23919/MIPRO48935.2020.9245357

M3 - Conference contribution

AN - SCOPUS:85097221890

SP - 1890

EP - 1893

BT - 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings

A2 - Koricic, Marko

A2 - Skala, Karolj

A2 - Car, Zeljka

A2 - Cicin-Sain, Marina

A2 - Sruk, Vlado

A2 - Skvorc, Dejan

A2 - Ribaric, Slobodan

A2 - Jerbic, Bojan

A2 - Gros, Stjepan

A2 - Vrdoljak, Boris

A2 - Mauher, Mladen

A2 - Tijan, Edvard

A2 - Katulic, Tihomir

A2 - Pale, Predrag

A2 - Grbac, Tihana Galinac

A2 - Fijan, Nikola Filip

A2 - Boukalov, Adrian

A2 - Cisic, Dragan

A2 - Gradisnik, Vera

PB - IEEE

T2 - 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020

Y2 - 28 September 2020 through 2 October 2020

ER -

Karuza M, Bozicevic D, Cantatore G, Vretenar M. Radiation pressure sensor. In Koricic M, Skala K, Car Z, Cicin-Sain M, Sruk V, Skvorc D, Ribaric S, Jerbic B, Gros S, Vrdoljak B, Mauher M, Tijan E, Katulic T, Pale P, Grbac TG, Fijan NF, Boukalov A, Cisic D, Gradisnik V, editors, 2020 43rd International Convention on Information, Communication and Electronic Technology, MIPRO 2020 - Proceedings. IEEE. 2020. p. 1890-1893. 9245357 doi: 10.23919/MIPRO48935.2020.9245357

Radiation pressure sensor

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