Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby

K.N. Koshelev (Inventor), Frederik Bijkerk (Inventor), G.G. Zukavishvili (Inventor), E.D. Korop (Inventor), V.V. Ivanov (Inventor)

Research output: Patent

Original languageEnglish
Patent numberUS20060600340 20061116
Priority date3/07/00
Publication statusIn preparation - 2010

Keywords

  • METIS-316946

Cite this

Koshelev, K. N., Bijkerk, F., Zukavishvili, G. G., Korop, E. D., & Ivanov, V. V. (2010). Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby. Manuscript in preparation. (Patent No. US20060600340 20061116).