Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby

K.N. Koshelev; Frederik Bijkerk; G.G. Zukavishvili; E.D. Korop; V.V. Ivanov

Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby

K.N. Koshelev (Inventor), Frederik Bijkerk (Inventor), G.G. Zukavishvili (Inventor), E.D. Korop (Inventor), V.V. Ivanov (Inventor)

Research output: Patent

Original language	English
Patent number	US20060600340 20061116
Priority date	3/07/00
Publication status	In preparation - 2010

Keywords

METIS-316946

Cite this

@misc{099327ad42604f979fea29dcfa3cb68f,

title = "Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby",

keywords = "METIS-316946",

author = "K.N. Koshelev and Frederik Bijkerk and G.G. Zukavishvili and E.D. Korop and V.V. Ivanov",

note = "Continuation of application no. 09/893.347, filed on June 28, 2001, then Pat. No. 6.818.912, now patent no. 6667484 ; US20060600340 20061116",

year = "2010",

language = "English",

type = "Patent",

}

TY - PAT

T1 - Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby

AU - Koshelev, K.N.

AU - Bijkerk, Frederik

AU - Zukavishvili, G.G.

AU - Korop, E.D.

AU - Ivanov, V.V.

N1 - Continuation of application no. 09/893.347, filed on June 28, 2001, then Pat. No. 6.818.912, now patent no. 6667484

PY - 2010

Y1 - 2010

KW - METIS-316946

M3 - Patent

M1 - US20060600340 20061116

ER -