Radio frequency power sensor based on mems technology with ultra low loss

L.J. Fernandez, J. Sesé, Remco J. Wiegerink, Jakob Flokstra, Henricus V. Jansen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.
Original languageUndefined
Title of host publication18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.
Place of PublicationLos Alamitos
PublisherIEEE Computer Society Press
Pages191-194
Number of pages4
ISBN (Print)0-7803-8732-5
DOIs
Publication statusPublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States
Duration: 30 Jan 20053 Feb 2005
Conference number: 18

Publication series

Name
PublisherIEEE

Conference

Conference18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
Abbreviated titleMEMS
CountryUnited States
CityMiami Beach
Period30/01/053/02/05

Keywords

  • EWI-9914
  • IR-54399
  • METIS-228533

Cite this

Fernandez, L. J., Sesé, J., Wiegerink, R. J., Flokstra, J., Jansen, H. V., & Elwenspoek, M. C. (2005). Radio frequency power sensor based on mems technology with ultra low loss. In 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. (pp. 191-194). Los Alamitos: IEEE Computer Society Press. https://doi.org/10.1109/MEMSYS.2005.1453899
Fernandez, L.J. ; Sesé, J. ; Wiegerink, Remco J. ; Flokstra, Jakob ; Jansen, Henricus V. ; Elwenspoek, Michael Curt. / Radio frequency power sensor based on mems technology with ultra low loss. 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos : IEEE Computer Society Press, 2005. pp. 191-194
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title = "Radio frequency power sensor based on mems technology with ultra low loss",
abstract = "A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.",
keywords = "EWI-9914, IR-54399, METIS-228533",
author = "L.J. Fernandez and J. Ses{\'e} and Wiegerink, {Remco J.} and Jakob Flokstra and Jansen, {Henricus V.} and Elwenspoek, {Michael Curt}",
year = "2005",
doi = "10.1109/MEMSYS.2005.1453899",
language = "Undefined",
isbn = "0-7803-8732-5",
publisher = "IEEE Computer Society Press",
pages = "191--194",
booktitle = "18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.",

}

Fernandez, LJ, Sesé, J, Wiegerink, RJ, Flokstra, J, Jansen, HV & Elwenspoek, MC 2005, Radio frequency power sensor based on mems technology with ultra low loss. in 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. IEEE Computer Society Press, Los Alamitos, pp. 191-194, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, United States, 30/01/05. https://doi.org/10.1109/MEMSYS.2005.1453899

Radio frequency power sensor based on mems technology with ultra low loss. / Fernandez, L.J.; Sesé, J.; Wiegerink, Remco J.; Flokstra, Jakob; Jansen, Henricus V.; Elwenspoek, Michael Curt.

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos : IEEE Computer Society Press, 2005. p. 191-194.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Radio frequency power sensor based on mems technology with ultra low loss

AU - Fernandez, L.J.

AU - Sesé, J.

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AU - Flokstra, Jakob

AU - Jansen, Henricus V.

AU - Elwenspoek, Michael Curt

PY - 2005

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N2 - A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.

AB - A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.

KW - EWI-9914

KW - IR-54399

KW - METIS-228533

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DO - 10.1109/MEMSYS.2005.1453899

M3 - Conference contribution

SN - 0-7803-8732-5

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BT - 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.

PB - IEEE Computer Society Press

CY - Los Alamitos

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Fernandez LJ, Sesé J, Wiegerink RJ, Flokstra J, Jansen HV, Elwenspoek MC. Radio frequency power sensor based on mems technology with ultra low loss. In 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. Los Alamitos: IEEE Computer Society Press. 2005. p. 191-194 https://doi.org/10.1109/MEMSYS.2005.1453899