Radio frequency power sensor based on mems technology with ultra low loss

L.J. Fernandez, J. Sesé, Remco J. Wiegerink, Jakob Flokstra, Henricus V. Jansen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

13 Citations (Scopus)
80 Downloads (Pure)

Abstract

A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.
Original languageUndefined
Title of host publication18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.
Place of PublicationLos Alamitos
PublisherIEEE Computer Society Press
Pages191-194
Number of pages4
ISBN (Print)0-7803-8732-5
DOIs
Publication statusPublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States
Duration: 30 Jan 20053 Feb 2005
Conference number: 18

Publication series

Name
PublisherIEEE

Conference

Conference18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
Abbreviated titleMEMS
CountryUnited States
CityMiami Beach
Period30/01/053/02/05

Keywords

  • EWI-9914
  • IR-54399
  • METIS-228533

Cite this

Fernandez, L. J., Sesé, J., Wiegerink, R. J., Flokstra, J., Jansen, H. V., & Elwenspoek, M. C. (2005). Radio frequency power sensor based on mems technology with ultra low loss. In 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. (pp. 191-194). Los Alamitos: IEEE Computer Society Press. https://doi.org/10.1109/MEMSYS.2005.1453899