Abstract
A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.
Original language | Undefined |
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Title of host publication | 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. |
Place of Publication | Los Alamitos |
Publisher | IEEE |
Pages | 191-194 |
Number of pages | 4 |
ISBN (Print) | 0-7803-8732-5 |
DOIs | |
Publication status | Published - 2005 |
Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States Duration: 30 Jan 2005 → 3 Feb 2005 Conference number: 18 |
Publication series
Name | |
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Publisher | IEEE |
Conference
Conference | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 |
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Abbreviated title | MEMS |
Country/Territory | United States |
City | Miami Beach |
Period | 30/01/05 → 3/02/05 |
Keywords
- EWI-9914
- IR-54399
- METIS-228533