Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by direct UV-lithography

Tim Scharnweber, R.K. Truckenmüller, Andrea M. Schneider, Alexander Welle, Martina Reinhardt, Stefan Giselbrecht

Research output: Contribution to journalArticleAcademicpeer-review

41 Citations (Scopus)


Microstructuring of polydimethylsiloxane (PDMS) is a key step for many lab-on-a-chip (LOC) applications. In general, the structure is generated by casting the liquid prepolymer against a master. The production of the master in turn calls for special equipment and know how. Furthermore, a given master only allows the reproduction of the defined structure. We report on a simple, cheap and practical method to produce microstructures in already cured PDMS by direct UV-lithography followed by chemical development. Due to the available options during the lithographic process like multiple exposures, the method offers a high design flexibility granting easy access to complex and stepped structures. Furthermore, no master is needed and the use of pre-cured PDMS allows processing at ambient (light) conditions. Features down to approximately 5 µm and a depth of 10 µm can be realised. As a proof of principle, we demonstrate the feasibility of the process by applying the structures to various established soft lithography techniques.
Original languageEnglish
Pages (from-to)1368-1371
JournalLab on a chip
Issue number7
Publication statusPublished - 2011


  • METIS-282852
  • IR-80786

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