Rapid thermal multi-processing, system design and construction

I. Barsony, J.L.P. Heideman, J. Middelhoek, Hans Wallinga

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Pages-
    Publication statusPublished - 29 Nov 1990
    EventFOM Werkgemeenschap Halfgeleiders 1990 - Veldhoven, Netherlands
    Duration: 28 Nov 199029 Nov 1990

    Conference

    ConferenceFOM Werkgemeenschap Halfgeleiders 1990
    CountryNetherlands
    CityVeldhoven
    Period28/11/9029/11/90

    Keywords

    • METIS-117181

    Cite this

    Barsony, I., Heideman, J. L. P., Middelhoek, J., & Wallinga, H. (1990). Rapid thermal multi-processing, system design and construction. -. Poster session presented at FOM Werkgemeenschap Halfgeleiders 1990, Veldhoven, Netherlands.