Rapid thermal oxidation for passivation of porous silicon

I. Barsony, J.G.E. Klappe, E. Vazsonyi, T. Lohner, M. Fried

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	91-96
Journal	Materials Research Society symposia proceedings
Issue number	342
Publication status	Published - 1994

Keywords

@article{b5fb7505c0684c5cb71beb88f9c0ef20,

title = "Rapid thermal oxidation for passivation of porous silicon",

keywords = "METIS-112049",

author = "I. Barsony and J.G.E. Klappe and E. Vazsonyi and T. Lohner and M. Fried",

year = "1994",

language = "Undefined",

pages = "91--96",

journal = "Materials Research Society symposia proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

number = "342",

}