Reactive ion etching in micromechanics and micromachining

Henricus V. Jansen

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationEde
    Publication statusPublished - 26 Nov 1993

    Keywords

    • METIS-117983

    UN SDGs

    This output contributes to the following UN Sustainable Development Goals (SDGs)

    • SDG 9 - Industry, Innovation, and Infrastructure

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