Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

    Research output: Contribution to journalArticleAcademicpeer-review

    12 Citations (Scopus)

    Abstract

    We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.
    Original languageUndefined
    Pages (from-to)215-217
    Number of pages3
    JournalIEEE photonics technology letters
    Volume23
    Issue number4
    DOIs
    Publication statusPublished - 15 Feb 2011

    Keywords

    • METIS-277507
    • IR-75840
    • Cantilever
    • TMAH
    • grated waveguide (GWG)
    • hydrogen sensor
    • reactive ion etching (RIE)
    • EWI-19420
    • IOMS-SNS: SENSORS

    Cite this

    Pham Van So, P.V.S. ; Kauppinen, L.J. ; Dijkstra, Mindert ; van Wolferen, Hendricus A.G.M. ; de Ridder, R.M. ; Hoekstra, Hugo. / Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity. In: IEEE photonics technology letters. 2011 ; Vol. 23, No. 4. pp. 215-217.
    @article{7f3aca8370104b7cb7463f27e405f02d,
    title = "Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity",
    abstract = "We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.",
    keywords = "METIS-277507, IR-75840, Cantilever, TMAH, grated waveguide (GWG), hydrogen sensor, reactive ion etching (RIE), EWI-19420, IOMS-SNS: SENSORS",
    author = "{Pham Van So}, P.V.S. and L.J. Kauppinen and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and {de Ridder}, R.M. and Hugo Hoekstra",
    note = "eemcs-eprint-19420",
    year = "2011",
    month = "2",
    day = "15",
    doi = "10.1109/LPT.2010.2097246",
    language = "Undefined",
    volume = "23",
    pages = "215--217",
    journal = "IEEE photonics technology letters",
    issn = "1041-1135",
    publisher = "IEEE",
    number = "4",

    }

    Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity. / Pham Van So, P.V.S.; Kauppinen, L.J.; Dijkstra, Mindert; van Wolferen, Hendricus A.G.M.; de Ridder, R.M.; Hoekstra, Hugo.

    In: IEEE photonics technology letters, Vol. 23, No. 4, 15.02.2011, p. 215-217.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity

    AU - Pham Van So, P.V.S.

    AU - Kauppinen, L.J.

    AU - Dijkstra, Mindert

    AU - van Wolferen, Hendricus A.G.M.

    AU - de Ridder, R.M.

    AU - Hoekstra, Hugo

    N1 - eemcs-eprint-19420

    PY - 2011/2/15

    Y1 - 2011/2/15

    N2 - We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.

    AB - We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.

    KW - METIS-277507

    KW - IR-75840

    KW - Cantilever

    KW - TMAH

    KW - grated waveguide (GWG)

    KW - hydrogen sensor

    KW - reactive ion etching (RIE)

    KW - EWI-19420

    KW - IOMS-SNS: SENSORS

    U2 - 10.1109/LPT.2010.2097246

    DO - 10.1109/LPT.2010.2097246

    M3 - Article

    VL - 23

    SP - 215

    EP - 217

    JO - IEEE photonics technology letters

    JF - IEEE photonics technology letters

    SN - 1041-1135

    IS - 4

    ER -