Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity

P.V.S. Pham Van So; L.J. Kauppinen; Mindert Dijkstra; Hendricus A.G.M. van Wolferen; R.M. de Ridder; Hugo Hoekstra

doi:10.1109/LPT.2010.2097246

Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

Research output: Contribution to journal › Article › Academic › peer-review

17 Citations (Scopus)

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Abstract

We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.

Original language	Undefined
Pages (from-to)	215-217
Number of pages	3
Journal	IEEE photonics technology letters
Volume	23
Issue number	4
DOIs	https://doi.org/10.1109/LPT.2010.2097246
Publication status	Published - 15 Feb 2011

Keywords

METIS-277507
IR-75840
Cantilever
TMAH
grated waveguide (GWG)
hydrogen sensor
reactive ion etching (RIE)
EWI-19420
IOMS-SNS: SENSORS

Access to Document

10.1109/LPT.2010.2097246

http://eprints.eemcs.utwente.nl/secure2/19420/01/PTL23-215_Pham.pdf

Cite this

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title = "Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity",

abstract = "We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.",

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AU - Pham Van So, P.V.S.

AU - Kauppinen, L.J.

AU - Dijkstra, Mindert

AU - van Wolferen, Hendricus A.G.M.

AU - de Ridder, R.M.

AU - Hoekstra, Hugo

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AB - We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.

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