Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

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    13 Citations (Scopus)

    Abstract

    We present results related to the fabrication of a novel and potentially highly sensitive mechano-optical sensor for hydrogen gas, based on microcantilevers, provided with a selectively gas-absorbing palladium layer, suspended above a ${Si}_{3}{N} _{4}$ grated waveguide (GWG). Integrated microcantilever-GWG devices have been fabricated successfully using microelectromechanical systems (MEMS) techniques. Several technical problems encountered during the preparation of such integrated devices (i.e., grating production, surface roughness, facet quality) will be discussed, and solutions to address these issues will be given as well. We also present preliminary experimental results, showing the sensing of cantilever nano-displacements, and so the feasibility of proposed read-out principle.
    Original languageUndefined
    Pages (from-to)215-217
    Number of pages3
    JournalIEEE photonics technology letters
    Volume23
    Issue number4
    DOIs
    Publication statusPublished - 15 Feb 2011

    Keywords

    • METIS-277507
    • IR-75840
    • Cantilever
    • TMAH
    • grated waveguide (GWG)
    • hydrogen sensor
    • reactive ion etching (RIE)
    • EWI-19420
    • IOMS-SNS: SENSORS

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