Readout circuit for capacitance ratio measurement

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    Abstract

    This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.
    Original languageEnglish
    Title of host publication41st International Conference on Micro- and Nano-Engineering, MNE 2015
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Number of pages1
    DOIs
    Publication statusPublished - 21 Sept 2015
    Event41st International Conference on Micro- and Nano-Engineering, MNE 2015 - The Hague, Netherlands
    Duration: 21 Sept 201524 Sept 2015
    Conference number: 41

    Conference

    Conference41st International Conference on Micro- and Nano-Engineering, MNE 2015
    Abbreviated titleMNE
    Country/TerritoryNetherlands
    CityThe Hague
    Period21/09/1524/09/15

    Keywords

    • Inline pressure sensor
    • Capacitive readout

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