Readout circuit for capacitance ratio measurement

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

12 Downloads (Pure)

Abstract

This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.
Original languageUndefined
Title of host publication41st International Conference on Micro- and Nano-Engineering, MNE 2015
Place of PublicationEnschede
PublisherUniversiteit Twente
Pages1
Number of pages1
ISBN (Print)not assigned
DOIs
Publication statusPublished - 21 Sep 2015
Event41st International Conference on Micro- and Nano-Engineering, MNE 2015 - The Hague, Netherlands
Duration: 21 Sep 201524 Sep 2015
Conference number: 41

Publication series

Name
PublisherUniversity of Twente

Conference

Conference41st International Conference on Micro- and Nano-Engineering, MNE 2015
Abbreviated titleMNE
CountryNetherlands
CityThe Hague
Period21/09/1524/09/15

Keywords

  • EWI-26564
  • inline pressure sensor
  • METIS-315097
  • Capacitive readout
  • IR-98710

Cite this

Lammerink, T. S. J., Groenesteijn, J., Lötters, J. C., & Wiegerink, R. J. (2015). Readout circuit for capacitance ratio measurement. In 41st International Conference on Micro- and Nano-Engineering, MNE 2015 (pp. 1). Enschede: Universiteit Twente. https://doi.org/10.13140/RG.2.1.1761.6727
Lammerink, Theodorus S.J. ; Groenesteijn, Jarno ; Lötters, Joost Conrad ; Wiegerink, Remco J. / Readout circuit for capacitance ratio measurement. 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede : Universiteit Twente, 2015. pp. 1
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title = "Readout circuit for capacitance ratio measurement",
abstract = "This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.",
keywords = "EWI-26564, inline pressure sensor, METIS-315097, Capacitive readout, IR-98710",
author = "Lammerink, {Theodorus S.J.} and Jarno Groenesteijn and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",
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doi = "10.13140/RG.2.1.1761.6727",
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publisher = "Universiteit Twente",
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booktitle = "41st International Conference on Micro- and Nano-Engineering, MNE 2015",

}

Lammerink, TSJ, Groenesteijn, J, Lötters, JC & Wiegerink, RJ 2015, Readout circuit for capacitance ratio measurement. in 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Universiteit Twente, Enschede, pp. 1, 41st International Conference on Micro- and Nano-Engineering, MNE 2015, The Hague, Netherlands, 21/09/15. https://doi.org/10.13140/RG.2.1.1761.6727

Readout circuit for capacitance ratio measurement. / Lammerink, Theodorus S.J.; Groenesteijn, Jarno; Lötters, Joost Conrad; Wiegerink, Remco J.

41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede : Universiteit Twente, 2015. p. 1.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Readout circuit for capacitance ratio measurement

AU - Lammerink, Theodorus S.J.

AU - Groenesteijn, Jarno

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

N1 - 10.13140/RG.2.1.1761.6727

PY - 2015/9/21

Y1 - 2015/9/21

N2 - This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.

AB - This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.

KW - EWI-26564

KW - inline pressure sensor

KW - METIS-315097

KW - Capacitive readout

KW - IR-98710

U2 - 10.13140/RG.2.1.1761.6727

DO - 10.13140/RG.2.1.1761.6727

M3 - Conference contribution

SN - not assigned

SP - 1

BT - 41st International Conference on Micro- and Nano-Engineering, MNE 2015

PB - Universiteit Twente

CY - Enschede

ER -

Lammerink TSJ, Groenesteijn J, Lötters JC, Wiegerink RJ. Readout circuit for capacitance ratio measurement. In 41st International Conference on Micro- and Nano-Engineering, MNE 2015. Enschede: Universiteit Twente. 2015. p. 1 https://doi.org/10.13140/RG.2.1.1761.6727