Readout circuit for capacitance ratio measurement

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    Abstract

    This paper presents a technique for measuring the ratio between two on-chip capacitances which largely eliminates the influence of drift in the electronic measurement circuit. Measurement results on an inline capacitive pressure sensor are presented.
    Original languageUndefined
    Title of host publication41st International Conference on Micro- and Nano-Engineering, MNE 2015
    Place of PublicationEnschede
    PublisherUniversiteit Twente
    Pages1
    Number of pages1
    ISBN (Print)not assigned
    DOIs
    Publication statusPublished - 21 Sep 2015
    Event41st International Conference on Micro- and Nano-Engineering, MNE 2015 - The Hague, Netherlands
    Duration: 21 Sep 201524 Sep 2015
    Conference number: 41

    Publication series

    Name
    PublisherUniversity of Twente

    Conference

    Conference41st International Conference on Micro- and Nano-Engineering, MNE 2015
    Abbreviated titleMNE
    CountryNetherlands
    CityThe Hague
    Period21/09/1524/09/15

    Keywords

    • EWI-26564
    • inline pressure sensor
    • METIS-315097
    • Capacitive readout
    • IR-98710

    Cite this

    Lammerink, T. S. J., Groenesteijn, J., Lötters, J. C., & Wiegerink, R. J. (2015). Readout circuit for capacitance ratio measurement. In 41st International Conference on Micro- and Nano-Engineering, MNE 2015 (pp. 1). Enschede: Universiteit Twente. https://doi.org/10.13140/RG.2.1.1761.6727